powderИзвестия вузов. Порошковая металлургия и функциональные покрытияPowder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya)1997-308X2412-8767НИТУ "МИСИС"10.17073/1997-308X-2025-3-60-73powder-1005Research ArticleНаноструктурированные материалы и функциональные покрытияNanostructured Materials and Functional CoatingsСтруктура и свойства антифрикционных покрытий в системе Ti–Cr–Ni–Cu–Sn–P–C–N, полученных методом магнетронного распыления композиционных СВС-мишенейStructure and properties of antifriction Ti–Cr–Ni–Cu–Sn–P–C–N coatings deposited by magnetron sputtering of composite SHS targetshttps://orcid.org/0000-0003-1635-4746Кирюханцев-КорнеевФ. В.Kiryukhantsev-KorneevPh. V.

Филипп Владимирович Кирюханцев-Корнеев – д.т.н., профессор кафедры порошковой металлургии и функциональных покрытий (ПМиФП) Национального исследовательского технологического университета «МИСИС» (НИТУ МИСИС), зав. лабораторией «In situ диагностика структурных превращений» Научно-учебного центра (НУЦ) СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Philipp V. Kiryukhantsev-Korneev – Dr. Sci. (Eng.), Professor of the Department of Powder Metallurgy and Functional Coatings (PM&FC) of National University of Science and Technology “MISIS” (NUST MISIS), Head of the Laboratory "In situ Diagnostics of Structural Transformations” of Scientific-Educational Center of Self-Propagating High-Temperature Synthesis MISIS–ISMAN (SHS-Center)

1 Bld, 4 Leninskiy Prosp, Moscow 119049, Russia

kiruhancev-korneev@yandex.ruhttps://orcid.org/0000-0002-8668-5877ЧертоваА. Д.ChertovaA. D.

Алина Дмитриевна Чертова – к.т.н, науч. сотрудник НУЦ СВС МИСИС–ИСМАН 

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Alina D. Chertova – Cand. Sci. (Eng.), Research Scientist of SHS-Center MISIS–ISMAN

1 Bld, 4 Leninskiy Prosp, Moscow 119049, Russia

alina-sytchenko@yandex.ruhttps://orcid.org/0000-0001-6733-7212ПогожевЮ. С.PogozhevYu. S.

Юрий Сергеевич Погожев – к.т.н., ст. науч. сотрудник НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Yuri S. Pogozhev – Cand. Sci. (Eng.), Senior Research Scientist of SHS-Center MISIS–ISMAN

1 Bld, 4 Leninskiy Prosp, Moscow 119049, Russia

yspogozhev@mail.ruhttps://orcid.org/0000-0002-0623-0013ЛевашовЕ. А.LevashovE. A.

Евгений Александрович Левашов – д.т.н., проф., чл.-корр. РАН, зав. кафедрой ПМиФП, НИТУ МИСИС, директор НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Evgeniy A. Levashov – Dr. Sci. (Eng.), Prof., Corresponding Member of the RAS, Head of the Department of PM&FC of NUST MISIS, Director of SHS-Center MISIS–ISMAN

1 Bld, 4 Leninskiy Prosp, Moscow 119049, Russia

levashov@shs.misis.ruНациональный исследовательский технологический университет «МИСИС»РоссияNational University of Science and Technology “MISIS”Russian Federation2025250620251936073Copyright © НИТУ "МИСИС", 20252025НИТУ "МИСИС"НИТУ "МИСИС"https://powder.misis.ru/jour/about/submissions#copyrightNoticehttps://powder.misis.ru/jour/article/view/1005

Статья посвящена получению антифрикционных износостойких покрытий методом магнетронного распыления с использованием композиционных катодов-мишеней TiCrNiC и TiCrNiC–CuSnP в среде Ar и Ar + 15 % N2 . Отдельное внимание уделено изучению фазового состава и структуры мишеней, изготовленных с применением метода самораспрост­раняющегося высокотемпературного синтеза (СВС). Структурные исследования мишеней и покрытий выполнены методами рентгенофазового анализа, растровой электронной микроскопии, энергодисперсионной спектроскопии и оптической эмиссионной спектроскопии тлеющего разряда. Механические и трибологические свойства покрытий измерены с использованием методов наноиндентирования, скратч-тестирования и измерительного скольжения. Установлено, что полученные покрытия обладали плотной малодефектной структурой с равномерным распределением элементов по толщине. Основу покрытий составляли ГЦК-фазы с-TiC(N) и с-(Ni,Cr). При введении в состав покрытий меди формировалась дополнительная аморфная фаза на ее основе. Покрытия обладали твердостью в диапазоне 18–21 ГПа и модулем упругости на уровне 220–235 ГПа, а также характеризовались высокой критической нагрузкой адгезионного разрушения до 60 Н. Минимальный коэффициент трения 0,17–0,18 демонстрировали нереакционные покрытия Ti–Cr–Ni–C, для остальных составов его значения находились в интервале от 0,22 до 0,25, в то время как у стальных подложек без покрытия этот показатель составлял 0,63–0,71. Величина приведенного износа, в зависимости от материала используемых контртел и составов покрытий, изменялась от 1,1·10–6 до 5,0·10–6 мм3/(Н∙м), что почти на два порядка ниже, чем у материала подложки: (1,2÷2,7)·10–4 мм3/(Н∙м).

This article focuses on the production of wear-resistant antifriction coatings by magnetron sputtering using composite SHS-fabricated cathode targets of TiCrNiC and TiCrNiC–CuSnP in Ar and Ar + 15 % N2 atmospheres. Special attention is given to the phase composition and structure of the targets, produced via the self-propagating high-temperature synthesis (SHS) method. Structural charac­terization of the targets and coatings was carried out using X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive spectroscopy (EDS), and glow discharge optical emission spectroscopy (GDOES). The mechanical and tribological properties of the coatings were evaluated using nanoindentation, scratch testing, and pin-on-disk sliding wear tests. The resulting coatings exhibi­ted dense, defect-free microstructures with a uniform elemental distribution through the thickness. The coating matrix was primarily composed of FCC phases c-TiC(N) and c-(Ni,Cr). The addition of copper to the coating led to the formation of an additional amorphous Cu-based phase. The coatings demonstrated hardness in the range of 18–21 GPa and an elastic modulus of 220–235 GPa. High critical loads for adhesive failure were observed, reaching up to 60 N. The non-reactive Ti–Cr–Ni–C coatings exhibited the lowest friction coefficients (0.17–0.18), while other compositions showed values ranging from 0.22 to 0.25, in contrast to 0.63–0.71 for uncoated steel substrates. The specific wear rate varied between 1.1·10–6 and 5.0·10–6 mm3/(N·m) depending on the counterbody material and coating composition, which is nearly two orders of magnitude lower than that of the substrate material ((1.2÷2.7)·10–4 mm3/(N·m).

карбид титанамагнетронное распылениекомпозиционные СВС-мишениантифрикционные покрытиякоэффициент трения и износостойкостьtitanium carbidemagnetron sputteringcomposite SHS targetsantifriction coatingsfriction coefficientwear resistanceРабота выполнена при финансовой поддержке Министерства науки и высшего образования РФ в рамках госу­дарственного задания (проект № FSME-2025-0003). Авторы признательны М.И. Петржику и М.Я. Бычковой за помощь в проведении механических и трибологических испытаний покрытий.This work was financially supported by the Ministry of Science and Higher Education of the Russian Federation under State Assignment No. FSME-2025-0003. The authors are grateful to M.I. Petrzhik and M.Ya. Bychkova for their assistance with the mechanical and tribological testing of the coatings.ReferencesLarhlimi H., Ghailane A., Makha M., Alami J. Magnetron sputtered titanium carbide-based coatings: A review of science and technology. Vacuum. 2022;197:110853. https://doi.org/10.1016/j.vacuum.2021.110853Larhlimi H., Ghailane A., Makha M., Alami J. Magnetron sputtered titanium carbide-based coatings: A review of science and technology. Vacuum. 2022;197:110853. https://doi.org/10.1016/j.vacuum.2021.110853He J., He Z., Qin Y., Zhao H., Bi Y. A review of TiCN coating prepared by reaction plasma spraying. Journal of Thermal Spray Technology. 2022;31(8):2280–2299. https://doi.org/10.1007/s11666-022-01454-5He J., He Z., Qin Y., Zhao H., Bi Y. A review of TiCN coating prepared by reaction plasma spraying. Journal of Thermal Spray Technology. 2022;31(8):2280–2299. https://doi.org/10.1007/s11666-022-01454-5Aramian A., Sadeghian Z., Narimani M., Razavi N., Berto F. A review on the microstructure and properties of TiC and Ti(C,N) based cermets. International Journal of Refractory Metals and Hard Materials. 2023;115:106320. https://doi.org/10.1016/j.ijrmhm.2023.106320Aramian A., Sadeghian Z., Narimani M., Razavi N., Berto F. A review on the microstructure and properties of TiC and Ti(C,N) based cermets. International Journal of Refractory Metals and Hard Materials. 2023;115:106320. https://doi.org/10.1016/j.ijrmhm.2023.106320Martínez-Martínez D., López-Cartes C., Justo A., Fernández A., Sánchez-López J.C. Self-lubricating Ti–C–N nanocomposite coatings prepared by double magnetron sputtering. Solid State Sciences. 2009;11(2):660–670. https://doi.org/10.1016/j.solidstatesciences.2008.09.004Martínez-Martínez D., López-Cartes C., Justo A., Fernández A., Sánchez-López J.C. Self-lubricating Ti–C–N nanocomposite coatings prepared by double magnetron sputtering. Solid State Sciences. 2009;11(2):660–670. https://doi.org/10.1016/j.solidstatesciences.2008.09.004Chen Q., Liang D., Zhang E., Yang L., Zhou Q., Huang B., Han S. Influence of C2H2/N2 flow ratio on the microstructure, mechanical properties, and electrochemical behavior of TiCN composite coatings. Vacuum. 2023;216:112349. https://doi.org/10.1016/j.vacuum.2023.112349Chen Q., Liang D., Zhang E., Yang L., Zhou Q., Huang B., Han S. Influence of C2H2/N2 flow ratio on the microstructure, mechanical properties, and electrochemical behavior of TiCN composite coatings. Vacuum. 2023;216:112349. https://doi.org/10.1016/j.vacuum.2023.112349Karlsson L., Hultman L., Johansson M.P., Sundgren J.-E., Ljungcrantz H. Growth, microstructure, and mechanical properties of arc evaporated TiCxN1−x (0 ≤ x ≤ 1) films. Surface and Coatings Technology. 2000;126(1):1–14. https://doi.org/10.1016/S0257-8972(00)00518-1Karlsson L., Hultman L., Johansson M.P., Sundgren J.-E., Ljungcrantz H. Growth, microstructure, and mechanical properties of arc evaporated TiCxN1−x (0 ≤ x ≤ 1) films. Surface and Coatings Technology. 2000;126(1):1–14. https://doi.org/10.1016/S0257-8972(00)00518-1Podhurska V., Kuprin O., Prikhna T., Ostash O., Pohl D., Karpets M., Sverdun V., Serbeniuk T., Chepil R., Potapov P., Ponomarov S. Development of oxidation-resistant and electrically conductive coating of Ti–Al–C system for the lightweight interconnects of solid oxide fuel cells. Heliyon. 2024;10(1):e23275. https://doi.org/10.1016/j.heliyon.2023.e23275Podhurska V., Kuprin O., Prikhna T., Ostash O., Pohl D., Karpets M., Sverdun V., Serbeniuk T., Chepil R., Potapov P., Ponomarov S. Development of oxidation-resistant and electrically conductive coating of Ti–Al–C system for the lightweight interconnects of solid oxide fuel cells. Heliyon. 2024;10(1):e23275. https://doi.org/10.1016/j.heliyon.2023.e23275Zhang X., Qiu Y., Tan Z., Lin J., Xu A., Zeng Y., Moore J.J., Jiang J. Effect of Al content on structure and properties of TiAlCN coatings prepared by magnetron sputtering. Journal of Alloys and Compounds. 2014;617:81–85. https://doi.org/10.1016/j.jallcom.2014.08.009Zhang X., Qiu Y., Tan Z., Lin J., Xu A., Zeng Y., Moore J.J., Jiang J. Effect of Al content on structure and properties of TiAlCN coatings prepared by magnetron sputtering. Journal of Alloys and Compounds. 2014;617:81–85. https://doi.org/10.1016/j.jallcom.2014.08.009Testa V., Morelli S., Bolelli G., Bosi F., Puddu P., Colella A., Manfredini T., Lusvarghi L. Corrosion and wear performances of alternative TiC-based thermal spray coa­tings. Surface and Coatings Technology. 2022;438:128400. https://doi.org/10.1016/j.surfcoat.2022.128400Testa V., Morelli S., Bolelli G., Bosi F., Puddu P., Colella A., Manfredini T., Lusvarghi L. Corrosion and wear performances of alternative TiC-based thermal spray coa­tings. Surface and Coatings Technology. 2022;438:128400. https://doi.org/10.1016/j.surfcoat.2022.128400Zhang S., Fu Y., Du H., Zeng X.T., Liu Y.C. Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings. Surface and Coatings Technology. 2003;162(1):42–48. https://doi.org/10.1016/S0257-8972(02)00561-3Zhang S., Fu Y., Du H., Zeng X.T., Liu Y.C. Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings. Surface and Coatings Technology. 2003;162(1):42–48. https://doi.org/10.1016/S0257-8972(02)00561-3Kiryukhantsev-Korneev Ph.V., Sheveyko A.N., Shvindina N.V., Levashov E.A., Shtansky D.V. Comparative study of Ti–C–Ni–Al, Ti–C–Ni–Fe, and Ti–C–Ni–Al/Ti–C–Ni–Fe coatings produced by magnetron sputtering, electro-spark deposition, and a combined two-step process. Ceramics International. 2018;44(6):7637–7646. https://doi.org/10.1016/j.ceramint.2018.01.091Kiryukhantsev-Korneev Ph.V., Sheveyko A.N., Shvindina N.V., Levashov E.A., Shtansky D.V. Comparative study of Ti–C–Ni–Al, Ti–C–Ni–Fe, and Ti–C–Ni–Al/Ti–C–Ni–Fe coatings produced by magnetron sputtering, electro-spark deposition, and a combined two-step process. Ceramics International. 2018;44(6):7637–7646. https://doi.org/10.1016/j.ceramint.2018.01.091Bondarev A.V., Kiryukhantsev-Korneev Ph.V., Leva­shov E.A., Shtansky D.V. Tribological behavior and self-healing functionality of TiNbCN–Ag coatings in wide temperature range. Applied Surface Science. 2017;396: 110–120. https://doi.org/10.1016/j.apsusc.2016.10.188Bondarev A.V., Kiryukhantsev-Korneev Ph.V., Leva­shov E.A., Shtansky D.V. Tribological behavior and self-healing functionality of TiNbCN–Ag coatings in wide temperature range. Applied Surface Science. 2017;396: 110–120. https://doi.org/10.1016/j.apsusc.2016.10.188Ghorbani M., Mazaheri M., Afshar A. Wear and friction characteristics of electrodeposited graphite–bronze composite coatings. Surface and Coatings Technology. 2005;190(1):32–38. https://doi.org/10.1016/j.surfcoat.2004.04.092Ghorbani M., Mazaheri M., Afshar A. Wear and friction characteristics of electrodeposited graphite–bronze composite coatings. Surface and Coatings Technology. 2005;190(1):32–38. https://doi.org/10.1016/j.surfcoat.2004.04.092Ghorbani M., Mazaheri M., Khangholi K., Kharazi Y. Electrodeposition of graphite-brass composite coatings and characterization of the tribological properties. Surface and Coatings Technology. 2001;148(1):71–76. https://doi.org/10.1016/S0257-8972(01)01322-6Ghorbani M., Mazaheri M., Khangholi K., Kharazi Y. Electrodeposition of graphite-brass composite coatings and characterization of the tribological properties. Surface and Coatings Technology. 2001;148(1):71–76. https://doi.org/10.1016/S0257-8972(01)01322-6Musil J., Louda M., Soukup Z., Kubásek M. Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films. Diamond and Related Materials. 2008;17(11):1905–1911. https://doi.org/10.1016/j.diamond.2008.04.009Musil J., Louda M., Soukup Z., Kubásek M. Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films. Diamond and Related Materials. 2008;17(11):1905–1911. https://doi.org/10.1016/j.diamond.2008.04.009Shao F., Zhao H., Ni J., Zhuang Y., Sheng J., Yang J., Zhong X., Tao S. Corrosion behavior and mechanical properties of plasma sprayed Al2O3-aluminum bronze and Ca2SiO4-aluminum bronze coatings. Materials Chemistry and Physics. 2024;311:128579. https://doi.org/10.1016/j.matchemphys.2023.128579Shao F., Zhao H., Ni J., Zhuang Y., Sheng J., Yang J., Zhong X., Tao S. Corrosion behavior and mechanical properties of plasma sprayed Al2O3-aluminum bronze and Ca2SiO4-aluminum bronze coatings. Materials Chemistry and Physics. 2024;311:128579. https://doi.org/10.1016/j.matchemphys.2023.128579Musil J. Hard and superhard nanocomposite coatings. Surface and Coatings Technology. 2000;125(1–3):322–330. https://doi.org/10.1016/S0257-8972(99)00586-1Musil J. Hard and superhard nanocomposite coatings. Surface and Coatings Technology. 2000;125(1–3):322–330. https://doi.org/10.1016/S0257-8972(99)00586-1Musil J., Kadlec S., Vyskočil J., Valvoda V. New results in d.c. reactive magnetron deposition of TiNx films. Thin Solid Films. 1988;167(1–2):107–120. https://doi.org/10.1016/0040-6090(88)90487-7Musil J., Kadlec S., Vyskočil J., Valvoda V. New results in d.c. reactive magnetron deposition of TiNx films. Thin Solid Films. 1988;167(1–2):107–120. https://doi.org/10.1016/0040-6090(88)90487-7Soldán J., Musil J. Structure and mechanical properties of DC magnetron sputtered TiC/Cu film. Vacuum. 2006;81(4):531–538. https://doi.org/10.1016/j.vacuum.2006.07.013Soldán J., Musil J. Structure and mechanical properties of DC magnetron sputtered TiC/Cu film. Vacuum. 2006;81(4):531–538. https://doi.org/10.1016/j.vacuum.2006.07.013Sun H., Billard A., Luo H., Zheng W.-T., Zheng X.-L., Dai M.-J., Lin S.-S., Shi Q., Sanchette F. Influence of carbon content on the mechanical properties of TiCN–Cu nanocomposite coatings prepared by multi-arc ion plating. Vacuum. 2021;187:110139. https://doi.org/10.1016/j.vacuum.2021.110139Sun H., Billard A., Luo H., Zheng W.-T., Zheng X.-L., Dai M.-J., Lin S.-S., Shi Q., Sanchette F. Influence of carbon content on the mechanical properties of TiCN–Cu nanocomposite coatings prepared by multi-arc ion plating. Vacuum. 2021;187:110139. https://doi.org/10.1016/j.vacuum.2021.110139Ghahabi E., Shajari Y., Razavi M., Mobasherpour I., Tayebi Fard S.A. Effect of iron content on the wear behavior and adhesion strength of TiC–Fe nanocomposite coatings on low carbon steel produced by air plasma spray. Cera­mics International. 2020;46(3):2670–2676. https://doi.org/10.1016/j.ceramint.2019.09.255Ghahabi E., Shajari Y., Razavi M., Mobasherpour I., Tayebi Fard S.A. Effect of iron content on the wear behavior and adhesion strength of TiC–Fe nanocomposite coatings on low carbon steel produced by air plasma spray. Cera­mics International. 2020;46(3):2670–2676. https://doi.org/10.1016/j.ceramint.2019.09.255Das A.K., Kumar R. Investigation on wear behaviour of TiC/Co/Y2O3 metal matrix composite coating developed on AZ91D Mg alloy by plasma transferred arc cladding process. Materials Letters. 2024;355:135457. https://doi.org/10.1016/j.matlet.2023.135457Das A.K., Kumar R. Investigation on wear behaviour of TiC/Co/Y2O3 metal matrix composite coating developed on AZ91D Mg alloy by plasma transferred arc cladding process. Materials Letters. 2024;355:135457. https://doi.org/10.1016/j.matlet.2023.135457Sun L., Wang X., Cao Y., Wang Y., Ma Q., Wu H., Hua K., Wang H. High-temperature fretting wear behavior and microstructure stability of a laser-cladding Ti–Al–C–N composite coating meditated by variable cycle conditions. Tribology International. 2025;201:110224. https://doi.org/10.1016/j.triboint.2024.110224Sun L., Wang X., Cao Y., Wang Y., Ma Q., Wu H., Hua K., Wang H. High-temperature fretting wear behavior and microstructure stability of a laser-cladding Ti–Al–C–N composite coating meditated by variable cycle conditions. Tribology International. 2025;201:110224. https://doi.org/10.1016/j.triboint.2024.110224Gvetadze R., Arutyunov S., Kryuchkov S., Antipov M., Bazhin, P., Mustafaev M., Deshev A., Tsarev V., Andre­ev M., Katkov I., Agasieva S., Avdeeva V. Cermet coa­tings obtained by electric spark alloying to increase service life of dental instruments. Ceramics International. 2024;50(24, Part A):52613–52621. https://doi.org/10.1016/j.ceramint.2024.10.112Gvetadze R., Arutyunov S., Kryuchkov S., Antipov M., Bazhin, P., Mustafaev M., Deshev A., Tsarev V., Andre­ev M., Katkov I., Agasieva S., Avdeeva V. Cermet coa­tings obtained by electric spark alloying to increase service life of dental instruments. Ceramics International. 2024;50(24, Part A):52613–52621. https://doi.org/10.1016/j.ceramint.2024.10.112Kuptsov K.A., Sheveyko A.N., Sidorenko D.A., Shtans­ky D.V. Electro-spark deposition in vacuum using graphite electrode at different electrode polarities: Peculiarities of microstructure, electrochemical and tribological properties. Applied Surface Science. 2021;566:150722. https://doi.org/10.1016/j.apsusc.2021.150722Kuptsov K.A., Sheveyko A.N., Sidorenko D.A., Shtans­ky D.V. Electro-spark deposition in vacuum using graphite electrode at different electrode polarities: Peculiarities of microstructure, electrochemical and tribological properties. Applied Surface Science. 2021;566:150722. https://doi.org/10.1016/j.apsusc.2021.150722Gassner M., Schalk N., Tkadletz M., Czettl C., Mitte­rer C. Thermal crack network on CVD TiCN/α-Al2O3 coated cemented carbide cutting tools. International Journal of Refractory Metals and Hard Materials. 2019;81:1–6. https://doi.org/10.1016/j.ijrmhm.2019.02.006Gassner M., Schalk N., Tkadletz M., Czettl C., Mitte­rer C. Thermal crack network on CVD TiCN/α-Al2O3 coated cemented carbide cutting tools. International Journal of Refractory Metals and Hard Materials. 2019;81:1–6. https://doi.org/10.1016/j.ijrmhm.2019.02.006Kiryukhantsev-Korneev P., Sytchenko A., Sheveyko A., Moskovskikh D., Vorotylo S. Two-layer nanocomposite TiC-based coatings produced by a combination of pulsed cathodic arc evaporation and vacuum electro-spark alloying. Materials. 2020;13(3):547. https://doi.org/10.3390/ma13030547Kiryukhantsev-Korneev P., Sytchenko A., Sheveyko A., Moskovskikh D., Vorotylo S. Two-layer nanocomposite TiC-based coatings produced by a combination of pulsed cathodic arc evaporation and vacuum electro-spark alloying. Materials. 2020;13(3):547. https://doi.org/10.3390/ma13030547Sajjadi S.A., Saba F., Ghadirzadeh A., Di Fonzo F. Synthesis of TiC coating on Ti substrate using pulsed laser deposition and mechanical milling techniques along with statistical modeling of the process by response surface methodology. Powder Technology. 2017;305:704–713. https://doi.org/10.1016/j.powtec.2016.10.054Sajjadi S.A., Saba F., Ghadirzadeh A., Di Fonzo F. Synthesis of TiC coating on Ti substrate using pulsed laser deposition and mechanical milling techniques along with statistical modeling of the process by response surface methodology. Powder Technology. 2017;305:704–713. https://doi.org/10.1016/j.powtec.2016.10.054Kelly P.J., Arnell R.D. Magnetron sputtering: A review of recent developments and applications. Vacuum. 2000;56(3):159–172. https://doi.org/10.1016/S0042-207X(99)00189-XKelly P.J., Arnell R.D. Magnetron sputtering: A review of recent developments and applications. Vacuum. 2000;56(3):159–172. https://doi.org/10.1016/S0042-207X(99)00189-XShtansky D.V., Gloushankova N.A., Sheveiko A.N., Kiryukhantsev-Korneev Ph.V., Bashkova I.A., Mav­rin B.N., Ignatov S.G., Filippovich S.Yu., Rojas C. Si-doped multifunctional bioactive nanostructured films. Surface and Coatings Technology. 2010;205(3):728–739. https://doi.org/10.1016/j.surfcoat.2010.07.063Shtansky D.V., Gloushankova N.A., Sheveiko A.N., Kiryukhantsev-Korneev Ph.V., Bashkova I.A., Mav­rin B.N., Ignatov S.G., Filippovich S.Yu., Rojas C. Si-doped multifunctional bioactive nanostructured films. Surface and Coatings Technology. 2010;205(3):728–739. https://doi.org/10.1016/j.surfcoat.2010.07.063Shtansky D.V., Kiryukhantsev-Korneev Ph.V., Shevey­ko A.N., Kutyrev A.E., Levashov E.A. Hard tribological Ti–Cr–B–N coatings with enhanced thermal stability, corrosion- and oxidation resistance. Surface and Coatings Technology. 2007;202(4–7):861–865. https://doi.org/10.1016/j.surfcoat.2007.05.064Shtansky D.V., Kiryukhantsev-Korneev Ph.V., Shevey­ko A.N., Kutyrev A.E., Levashov E.A. Hard tribological Ti–Cr–B–N coatings with enhanced thermal stability, corrosion- and oxidation resistance. Surface and Coatings Technology. 2007;202(4–7):861–865. https://doi.org/10.1016/j.surfcoat.2007.05.064Kiryukhantsev-Korneev Ph.V., Chertova A.D., Chudarin F.I., Patsera E.I., Levashov E.A. The structure and properties of high-entropy (MoTaNbZrHf)–Si–B coa­tings deposited by DCMS and HIPIMS methods using the multilayer target. Surface and Coatings Technology. 2024;484:130797. https://doi.org/10.1016/j.surfcoat.2024.130797Kiryukhantsev-Korneev Ph.V., Chertova A.D., Chudarin F.I., Patsera E.I., Levashov E.A. The structure and properties of high-entropy (MoTaNbZrHf)–Si–B coa­tings deposited by DCMS and HIPIMS methods using the multilayer target. Surface and Coatings Technology. 2024;484:130797. https://doi.org/10.1016/j.surfcoat.2024.130797Levashov E.A., Mukasyan A.S., Rogachev A.S., Shtansky D.V. Self-propagating high-temperature synthesis: An overview of recent developments. International Materials Reviews. 2017;62(4):203–239. https://doi.org/10.1080/09506608.2016.1243291Levashov E.A., Mukasyan A.S., Rogachev A.S., Shtansky D.V. Self-propagating high-temperature synthesis: An overview of recent developments. International Materials Reviews. 2017;62(4):203–239. https://doi.org/10.1080/09506608.2016.1243291Левашов Е.А., Малочкин О.В., Кудряшов А.Е., Глухов С.А., Свиридова Т.А., Гаммел Ф., Зухентрунк Р. Об особенностях влияния нанокристаллических порошков на процессы горения и формирование состава, структуры и свойств сплава СТИМ-3Б. Известия вузов. Цветная металлургия. 2001;(1):53–59.Levashov E.A., Malochkin O.V., Kudryashov A.E., Glu­khov S.A., Sviridova T.A., Gammel F., Zukhentrunk R. On features of the effect of nanocrystalline powders on burning processes and forming composition, structure, and properties of STIM-3B alloy. Izvestiya. Non-Ferrous Metallurgy. 2001;(1):53–59. (In Russ.).Shiryaev A.A. Thermodynamics of SHS: Modern approach. International Journal of Self-Propagating High-Temperature Synthesis. 1995;4(4):351–362.Shiryaev A.A. Thermodynamics of SHS: Modern approach. International Journal of Self-Propagating High-Temperature Synthesis. 1995;4(4):351–362.Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Sviridova T.A., Sidorenko D.A., Andreev N.V., Klechkovs­kaya V.V., Polčak J., Levashov E.A. Effects of doping with Zr and Hf on the structure and properties of Mo–Si–B coa­tings obtained by magnetron sputtering of composite targets. Surface and Coatings Technology. 2022;442:128141. https://doi.org/10.1016/j.surfcoat.2022.128141Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Sviridova T.A., Sidorenko D.A., Andreev N.V., Klechkovs­kaya V.V., Polčak J., Levashov E.A. Effects of doping with Zr and Hf on the structure and properties of Mo–Si–B coa­tings obtained by magnetron sputtering of composite targets. Surface and Coatings Technology. 2022;442:128141. https://doi.org/10.1016/j.surfcoat.2022.128141Кирюханцев-Корнеев Ф.В. Возможности метода оптической эмиссионной спектроскопии тлеющего разряда GDOES при исследовании покрытий. Известия вузов. Порошковая металлургия и функциональные покрытия. 2013;(2):60–70. https://doi.org/10.17073/1997-308X-2013-2-60-70Kiryukhantsev-Korneev F.V. Possibilities of glow discharge optical emission spectroscopy in the investigation of coatings. Russian Journal of Non-Ferrous Metals. 2014;55:494–504. https://doi.org/10.3103/S1067821214050126Зуева Л.В., Гусев А.И. Влияние нестехиометрии и упорядочения на период базисной структуры кубического карбида титана. Физика твердого тела. 1999;41(7):1134–1141.Zueva L.V., Gusev A.I. Effect of nonstoichiometry and ordering on the period of the basis structure of cubic titanium carbide. Physics of the Solid State. 1999;41(7):1032–1038. https://doi.org/10.1134/1.1130931Brydson R., Hondow N. Electron energy loss spectro­metry and energy dispersive X-ray analysis. In: Aber­ration-corrected analytical transmission electron microscopy. Eds. S. Brooks, R. Brydson. Wiley, 2011. P. 163–210. https://doi.org/10.1002/9781119978848.ch7Brydson R., Hondow N. Electron energy loss spectro­metry and energy dispersive X-ray analysis. In: Aber­ration-corrected analytical transmission electron microscopy. Eds. S. Brooks, R. Brydson. Wiley, 2011. P. 163–210. https://doi.org/10.1002/9781119978848.ch7Davis J.R. Copper and copper alloys. ASM International, 2001. 652 p.Davis J.R. Copper and copper alloys. ASM International, 2001. 652 p.Семенов А.П., Семенова И.А., Цыренов Д.Б.-Д., Николаев Э.О. Физическое распыление медного анода планарного магнетрона пучком ускоренных ионов аргона энергией 1–10 кэВ. Приборы и техника эксперимента. 2021;(4):44–46. https://doi.org/10.31857/S0032816221040261Semenov A.P., Semenova I.A., Tsyrenov D.B-D., Nikolaev E.O. Physical sputtering of a copper anode of a planar magnetron by a beam of accelerated argon ions with an energy of 1–10 keV. Instruments and Experimental Techniques. 2021;(64):539–541. https://doi.org/10.1134/S0020441221040242Mhadhbi M., Driss M. Titanium carbide: synthesis, pro­perties and applications. Journal of Brilliant Engineering. 2021;2:1–11. https://doi.org/10.36937/ben.2021.002.001Mhadhbi M., Driss M. Titanium carbide: synthesis, pro­perties and applications. Journal of Brilliant Engineering. 2021;2:1–11. https://doi.org/10.36937/ben.2021.002.001Kovtun Yu.V., Kuprin A.S., Podhurska V.Ya. Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions. Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2024;554:165433. https://doi.org/10.1016/j.nimb.2024.165433Kovtun Yu.V., Kuprin A.S., Podhurska V.Ya. Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions. Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2024;554:165433. https://doi.org/10.1016/j.nimb.2024.165433Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Kozlova N.S., Zabelina E.V., Sidorenko D.A., Levashov E.A., Feng P. Effect of nitrogen on the structure and properties of Zr–Si–B–N coatings deposited by magnetron sputte­ring. Surface and Coatings Technology. 2023;474:130042. https://doi.org/10.1016/j.surfcoat.2023.130042Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Kozlova N.S., Zabelina E.V., Sidorenko D.A., Levashov E.A., Feng P. Effect of nitrogen on the structure and properties of Zr–Si–B–N coatings deposited by magnetron sputte­ring. Surface and Coatings Technology. 2023;474:130042. https://doi.org/10.1016/j.surfcoat.2023.130042Hahn R., Tymoszuk A., Wojcik T., Kirnbauer A., Kozák T., Čapek J., Sauer M., Foelske A., Hunold O., Polcik P., Mayrhofer P.H., Riedl H. Phase formation and mechanical properties of reactively and non-reactively sputtered Ti–B–N hard coatings. Surface and Coatings Technology. 2021;420:127327. https://doi.org/10.1016/j.surfcoat.2021.127327Hahn R., Tymoszuk A., Wojcik T., Kirnbauer A., Kozák T., Čapek J., Sauer M., Foelske A., Hunold O., Polcik P., Mayrhofer P.H., Riedl H. Phase formation and mechanical properties of reactively and non-reactively sputtered Ti–B–N hard coatings. Surface and Coatings Technology. 2021;420:127327. https://doi.org/10.1016/j.surfcoat.2021.127327Lauridsen J., Nedfors N., Jansson U., Jensen J., Eklund P., Hultman L. Ti–B–C nanocomposite coatings deposited by magnetron sputtering. Applied Surface Science. 2012; 258(24):9907–9912. https://doi.org/10.1016/j.apsusc.2012.06.049Lauridsen J., Nedfors N., Jansson U., Jensen J., Eklund P., Hultman L. Ti–B–C nanocomposite coatings deposited by magnetron sputtering. Applied Surface Science. 2012; 258(24):9907–9912. https://doi.org/10.1016/j.apsusc.2012.06.049Larhlimi H., Ghailane A., Makha M., Alami J. Magnet­ron sputtered titanium carbide-based coatings: A review of science and technology. Vacuum. 2022;197:110853. https://doi.org/10.1016/j.vacuum.2021.110853Larhlimi H., Ghailane A., Makha M., Alami J. Magnet­ron sputtered titanium carbide-based coatings: A review of science and technology. Vacuum. 2022;197:110853. https://doi.org/10.1016/j.vacuum.2021.110853Sytchenko A.D., Kozlova N.S., Zabelina E.V., Loginov P.A., Levashov E.A., Kiryukhantsev-Korneev Ph.V. The effect of the Ar/N2 gas ratio on the structure and properties of Ta–Si–N coatings produced by magnet­ron sputtering of a TaSi2 target. Surface and Interfaces. 2023;37:102654. https://doi.org/10.1016/j.surfin.2023.102654Sytchenko A.D., Kozlova N.S., Zabelina E.V., Loginov P.A., Levashov E.A., Kiryukhantsev-Korneev Ph.V. The effect of the Ar/N2 gas ratio on the structure and properties of Ta–Si–N coatings produced by magnet­ron sputtering of a TaSi2 target. Surface and Interfaces. 2023;37:102654. https://doi.org/10.1016/j.surfin.2023.102654Beake B.D. The influence of the H/E ratio on wear resistance of coating systems – insights from small-scale tes­ting. Surface and Coatings Technology. 2022;442:128272. https://doi.org/10.1016/j.surfcoat.2022.128272Beake B.D. The influence of the H/E ratio on wear resistance of coating systems – insights from small-scale tes­ting. Surface and Coatings Technology. 2022;442:128272. https://doi.org/10.1016/j.surfcoat.2022.128272Leyland A., Matthews A. On the significance of the H/E ratio in wear control: A nanocomposite coating approach to optimised tribological behaviour. Wear. 2000;246:1–11. https://doi.org/10.1016/S0043-1648(00)00488-9Leyland A., Matthews A. On the significance of the H/E ratio in wear control: A nanocomposite coating approach to optimised tribological behaviour. Wear. 2000;246:1–11. https://doi.org/10.1016/S0043-1648(00)00488-9Musil J., Hromadka M., Novak P. Effect of nitrogen on tribological properties of amorphous carbon films alloyed with titanium. Surface and Coatings Technology. 2011;205(S2):S84–S88. https://doi.org/10.1016/j.surfcoat.2010.12.048Musil J., Hromadka M., Novak P. Effect of nitrogen on tribological properties of amorphous carbon films alloyed with titanium. Surface and Coatings Technology. 2011;205(S2):S84–S88. https://doi.org/10.1016/j.surfcoat.2010.12.048Zhao H., Guo F., Zhu L., He J., Yin F. The effect of Cu addition on the crystallization behavior and tribological properties of reactive plasma sprayed TiCN–Cu coatings. Ceramics International. 2020;46(6):8344–8351. https://doi.org/10.1016/j.ceramint.2019.12.066Zhao H., Guo F., Zhu L., He J., Yin F. The effect of Cu addition on the crystallization behavior and tribological properties of reactive plasma sprayed TiCN–Cu coatings. Ceramics International. 2020;46(6):8344–8351. https://doi.org/10.1016/j.ceramint.2019.12.066Heo S.B., Kim W.-R., Kim J.H., Choe S., Kim D.W., Lim J.-H., Park I.-W. Effects of copper content on the microstructural, mechanical and tribological properties of TiAlSiN–Cu superhard nanocomposite coatings. Coatings. 2022;12(12):1995. https://doi.org/10.3390/coatings12121995Heo S.B., Kim W.-R., Kim J.H., Choe S., Kim D.W., Lim J.-H., Park I.-W. Effects of copper content on the microstructural, mechanical and tribological properties of TiAlSiN–Cu superhard nanocomposite coatings. Coatings. 2022;12(12):1995. https://doi.org/10.3390/coatings12121995Li F., Dai W., Wu Z., Xu Y., Wang J., Wang Q. Effect of Cu content on the mechanical and tribological properties of MoN–Cu coatings deposited by HiPIMS. Surface and Coatings Technology. 2025;497:131769. https://doi.org/10.1016/j.surfcoat.2025.131769Li F., Dai W., Wu Z., Xu Y., Wang J., Wang Q. Effect of Cu content on the mechanical and tribological properties of MoN–Cu coatings deposited by HiPIMS. Surface and Coatings Technology. 2025;497:131769. ttps://doi.org/10.1016/j.surfcoat.2025.131769

The authors declare that there are no conflicts of interest present.