powderИзвестия вузов. Порошковая металлургия и функциональные покрытияPowder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya)1997-308X2412-8767НИТУ "МИСИС"10.17073/1997-308X.2026.592P.1140powder-1140Research ArticleНаноструктурированные материалы и функциональные покрытияNanostructured Materials and Functional CoatingsВлияние содержания азота на механические и трибологические свойства покрытий Ta–Si–C–N, полученных методом HIPIMSEffect of nitrogen content on the mechanical and tribological properties of Ta–Si–C–N coatings deposited by HIPIMShttps://orcid.org/0000-0003-1635-4746Кирюханцев-КорнеевФ. В.Kiryukhantsev-KorneevPh. V.

Филипп Владимирович Кирюханцев-Корнеев – д.т.н., профессор кафедры порошковой металлургии и функциональных покрытий (ПМиФП) Национального исследовательского технологическогно университета «МИСИС» (НИТУ МИСИС), заведующий лабораторией «In situ диагностика структурных превращений» Научно-учебного центра СВС (НУЦ СВС) МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Philipp V. Kiryukhantsev-Korneev – Dr. Sci. (Eng.), Professor of the Department of Powder Metallurgy and Functional Coatings (PM&FC), National University of Science and Technology “MISIS” (NUST MISIS); Head of the Laboratory “In situ Diagnostics of Structural Transformations” of Scientific Educational Center of Self-Pro­pagating High-Temperature Synthesis (SHS-Center) of MISIS–ISMAN

1 Bld, 4 Leninskiy Prosp., Moscow 119049, Russia

kiruhancev-korneev@yandex.ruhttps://orcid.org/0009-0005-3407-5339ЗачиняевА. Ю.ZachinyaevA. Yu.

Андрей Юрьевич Зачиняев – лаборант-исследователь НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Andrey Yu. Zachinyaev – Research Laboratory Assistant, SHS-Center of MISIS–ISMAN

1 Bld, 4 Leninskiy Prosp., Moscow 119049, Russia

zachinyaev52@yandex.ruhttps://orcid.org/0000-0002-0623-0013ЛевашовЕ. А.LevashovE. A.

Евгений Александрович Левашов – д.т.н., проф., чл.-корр. РАН, заведующий кафедрой ПМиФП НИТУ МИСИС, директор  НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4, стр. 1

Evgeny A. Levashov – Dr. Sci. (Eng.), Professor, Corresponding Member of the Russian Academy of Sciences, Head of the Department of PM&FC of NUST MISIS, Director of SHS-Center of MISIS–ISMAN

1 Bld, 4 Leninskiy Prosp., Moscow 119049, Russia

levashov@shs.misis.ruНациональный исследовательский технологический университет «МИСИС»РоссияNational University of Science and Technology “MISIS”Russian Federation202616102026203103113Copyright © Кирюханцев-Корнеев Ф.В., Зачиняев А.Ю., Левашов Е.А., 20262026Кирюханцев-Корнеев Ф.В., Зачиняев А.Ю., Левашов Е.А.Kiryukhantsev-Korneev P.V., Zachinyaev A.Y., Levashov E.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://powder.misis.ru/jour/article/view/1140

Покрытия Ta–Si–C–N были получены методом высокомощного импульсного магнетронного распыления (HIPIMS – high-power impulse magnetron sputtering) при варьировании содержания азота в рабочей газовой смеси. Для распыления применялась керамическая мишень TaSi2 + 30 % SiC, изготовленная с использованием методов самораспространяющегося высокотемпературного синтеза и горячего прессования. Пиковая мощность изменялась в диапазоне от 30 до 70 кВт, средняя мощность варьировалась от 0,9 до 1,7 кВт, пиковая сила тока находилась в интервале 50–100 А, частота и длительность импульсов составляли 1 кГц и 50 мкс соответственно. Структура покрытий исследована методами растровой электронной микроскопии, оптической эмиссионной спектроскопии тлеющего разряда, энергодисперсионной спектроскопии, рентгенофазового анализа. Механические характеристики определены с помощью метода наноиндентирования. Для определения коэффициента трения и величины приведенного износа проведены трибологические испытания по схеме «стержень–диск» на воздухе и в среде синтетического масла. После трибологических испытаний поверхность покрытий изучалась с использованием оптического профилометра. Все покрытия обладали плотной малодефектной структурой с равномерным распределением элементов по толщине. При повышении расхода азота скорость роста покрытий снижалась со 129 до 62 нм/мин, содержание азота достигало 52 ат. %. Согласно результатам исследований методом рентгенофазового анализа, покрытия можно охарактеризовать как рентгеноаморфные. Установлено, что введение в состав покрытий азота на уровне 16 ат. % позволяет получить максимальные твердость H = 25 ГПа, модуль упругости Е = 257 ГПа, упругое восстановление W = 57 %, индекс пластичности H/E = 0,097, сопротивление пластической деформации разрушения H3/E2 = 0,237 ГПа. Минимальные коэффициент трения на уровне 0,11 и приведенный износ 2·10–7 мм3/(Н·м) имели покрытия с 23 и 52 ат. % азота соответственно.

Ta–Si–C–N coatings were deposited by high-power impulse magnetron sputtering (HIPIMS) at different nitrogen contents in the working gas mixture. A TaSi2 + 30 % SiC ceramic target fabricated by self-propagating high-temperature synthesis and hot pressing was used for sputtering. The peak power ranged from 30 to 70 kW, the average power from 0.9 to 1.7 kW, and the peak current from 50 to 100 A. The pulse frequency and duration were 1 kHz and 50 µs, respectively. The coatings were characterized by scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersive X-ray spectroscopy, and X-ray diffraction (XRD) analysis. Their mechanical properties were determined by nanoindentation. Pin-on-disk tribological tests were performed in air and in synthetic oil to determine the friction coefficient and specific wear rate. After testing, the coating surfaces were examined using an optical profilometer. All coatings exhibited a dense, low-defect structure with a uniform elemental distribution through their thickness. As the nitrogen flow rate increased, the coating deposition rate decreased from 129 to 62 nm/min, and the nitrogen content reached 52 at. %. XRD analysis indicated that the coatings were X-ray amorphous. The coating containing 16 at. % nitrogen exhibited the highest ​​ hardness (H = 25 GPa), elastic modulus (E = 257 GPa), elastic recovery (W = 57 %), and resistance to plastic deformation (H3/E2 = 0.237 GPa), with an H/E ratio of 0.097. In synthetic oil, the lowest friction coefficient (0.11) and specific wear rate (2·10–7 mm3/(N·m) were obtained for the coatings containing 23 and 52 at. % nitrogen, respectively.

высокомощное импульсное магнетронное распыление (HIPIMS)Ta–Si–C–Nизносостойкие покрытиямеханические и трибологические свойстваhigh-power impulse magnetron sputtering (HIPIMS)Ta–Si–C–Nwear-resistant coatingsmechanical and tribological propertiesРабота выполнена при финансовой поддержке Министерства науки и высшего образования РФ в рамках государственного задания (проект № FSME-2025-0003). Авторы благодарны проф. М.И. Петржику за проведение исследований методом наноиндентирования.This work was supported by the Ministry of Science and Higher Education of the Russian Federation under the state assignment (project No. FSME-2025-0003). The authors thanks Prof. M.I. Petrzhik for performing the nanoindentation measurements.ReferencesLi X., Hu G., Tian J., Tian W., Xie W., Li X. Wear resistance enhancement of Ti–6Al–4V alloy by applying Zr-modified silicide coatings. Journal of Materials Engineering and Performance. 2018;27:1073–1082. https://doi.org/10.1007/s11665-018-3203-3Li X., Hu G., Tian J., Tian W., Xie W., Li X. Wear resistance enhancement of Ti–6Al–4V alloy by applying Zr-modified silicide coatings. Journal of Materials Engineering and Performance. 2018;27:1073–1082. https://doi.org/10.1007/s11665-018-3203-3Jian L.N., Wang H.M. Microstructure and wear beha­viours of laser-clad Cr13Ni5Si2-based metal-silicide coa­tings on a titanium alloy. Surface and Coatings Techno­logy. 2005;192(2–3):305–310. https://doi.org/10.1016/j.surfcoat.2004.05.025Jian L.N., Wang H.M. Microstructure and wear beha­viours of laser-clad Cr13Ni5Si2-based metal-silicide coa­tings on a titanium alloy. Surface and Coatings Techno­logy. 2005;192(2–3):305–310. https://doi.org/10.1016/j.surfcoat.2004.05.025Sheng W., Liu D., Wang H.M. Microstructure and high-temperature wear behavior of laser clad Ni–Ti–Si ternary metal silicide coatings. Surface and Coatings Technology. 2008;202(13):2871–2877. https://doi.org/10.1016/j.surfcoat.2007.10.029Sheng W., Liu D., Wang H.M. Microstructure and high-temperature wear behavior of laser clad Ni–Ti–Si ternary metal silicide coatings. Surface and Coatings Technology. 2008;202(13):2871–2877. https://doi.org/10.1016/j.surfcoat.2007.10.029Sytchenko A.D., Kozlova N.S., Zabelina E.V., Loginov P.A., Levashov E.A., Kiryukhantsev-Korneev Ph.V. The effect of the Ar/N2 gas ratio on the structure and properties of Ta–Si–N coatings produced by magnet­ron sputtering of TaSi2 target. Surfaces and Interfaces. 2023;37:102654. https://doi.org/10.1016/j.surfin.2023.102654Sytchenko A.D., Kozlova N.S., Zabelina E.V., Loginov P.A., Levashov E.A., Kiryukhantsev-Korneev Ph.V. The effect of the Ar/N2 gas ratio on the structure and properties of Ta–Si–N coatings produced by magnet­ron sputtering of TaSi2 target. Surfaces and Interfaces. 2023;37:102654. https://doi.org/10.1016/j.surfin.2023.102654Chung C.K., Chen T.S. Effect of nitrogen flow ratio on the microstructure evolution and nanoindented mechanical property of the Ta–Si–N thin films. Journal of Materials Research. 2008;23:494–499. https://doi.org/10.1557/JMR.2008.0065Chung C.K., Chen T.S. Effect of nitrogen flow ratio on the microstructure evolution and nanoindented mechanical property of the Ta–Si–N thin films. Journal of Materials Research. 2008;23:494–499. https://doi.org/10.1557/JMR.2008.0065Dong M., Zhu Y., Duan J., Wang C., Guo W., Li J., Wang L. Understanding wear mechanisms of TiSiCN/Zr(C)N coa­tings at elevated temperatures. Materials Characteri­zation. 2021;180:111411. https://doi.org/10.1016/j.matchar.2021.111411Dong M., Zhu Y., Duan J., Wang C., Guo W., Li J., Wang L. Understanding wear mechanisms of TiSiCN/Zr(C)N coa­tings at elevated temperatures. Materials Characteri­zation. 2021;180:111411. https://doi.org/10.1016/j.matchar.2021.111411Vitelaru C., Balaceanu M., Parau A., Luculescu C.R., Vladescu A. Investigation of nanostructured TiSiC–Zr and TiSiC–Cr hard coatings for industrial applications. Surface and Coatings Technology. 2014;251:21–28. https://doi.org/10.1016/j.surfcoat.2014.04.001Vitelaru C., Balaceanu M., Parau A., Luculescu C.R., Vladescu A. Investigation of nanostructured TiSiC–Zr and TiSiC–Cr hard coatings for industrial applications. Surface and Coatings Technology. 2014;251:21–28. https://doi.org/10.1016/j.surfcoat.2014.04.001Shtansky D.V., Kuptsov K.A., Kiryukhantsev-Kor­neev Ph.V., Sheveiko A.N., Fernandez A., Petrzhik M.I. Comparative investigation of Al- and Cr-doped TiSiCN coatings. Surface and Coatings Technology. 2011;205(19): 4640–4648. https://doi.org/10.1016/j.surfcoat.2011.04.012Shtansky D.V., Kuptsov K.A., Kiryukhantsev-Kor­neev Ph.V., Sheveiko A.N., Fernandez A., Petrzhik M.I. Comparative investigation of Al- and Cr-doped TiSiCN coatings. Surface and Coatings Technology. 2011;205(19): 4640–4648. https://doi.org/10.1016/j.surfcoat.2011.04.012Shtansky D.V., Gloushankova N.A., Sheveiko A.N., Kiryukhantsev-Korneev Ph.V., Bashkova I.A., Mav­rin B.N.,. Ignatov S.G., Filippovich S.Yu., Rojas C. Si-doped multifunctional bioactive nanostructured films. Surface and Coatings Technology. 2010;205(3):728–739. https://doi.org/10.1016/j.surfcoat.2010.07.063Shtansky D.V., Gloushankova N.A., Sheveiko A.N., Kiryukhantsev-Korneev Ph.V., Bashkova I.A., Mav­rin B.N.,. Ignatov S.G., Filippovich S.Yu., Rojas C. Si-doped multifunctional bioactive nanostructured films. Surface and Coatings Technology. 2010;205(3):728–739. https://doi.org/10.1016/j.surfcoat.2010.07.063Jeon J.-H., Jang C.S., Yoon S.-Y., Shin B.-C., Kim K.H. Effects of Si addition on the characteristic evolution and syntheses of nanocomposite Cr–Si–C–N coatings prepared by a hybrid coating system. Surface and Coatings Technology. 2005;200(5–6):1635–1639. https://doi.org/10.1016/J.SURFCOAT.2005.08.042Jeon J.-H., Jang C.S., Yoon S.-Y., Shin B.-C., Kim K.H. Effects of Si addition on the characteristic evolution and syntheses of nanocomposite Cr–Si–C–N coatings prepared by a hybrid coating system. Surface and Coatings Technology. 2005;200(5–6):1635–1639. https://doi.org/10.1016/J.SURFCOAT.2005.08.042Yang J., Jiang Y., Yuan Z., Wang X., Fang Q. Effect of carbon content on the microstructure and properties of W–Si–C–N coatings fabricated by magnetron sputtering. Mate­rials Science and Engineering: B. 2012;177(13): 1120–1125. https://doi.org/10.1016/j.mseb.2012.05.021Yang J., Jiang Y., Yuan Z., Wang X., Fang Q. Effect of carbon content on the microstructure and properties of W–Si–C–N coatings fabricated by magnetron sputtering. Mate­rials Science and Engineering: B. 2012;177(13): 1120–1125. https://doi.org/10.1016/j.mseb.2012.05.021Yuan Z.G., Yang J.F., Wang X.P., Cheng Z.J., Fang Q.F. Characterization and properties of quaternary Mo–Si–C–N coatings synthesized by magnetron sputtering technique. Surface and Coatings Technology. 2011; 205(10):3307–3312. https://doi.org/10.1016/j.surfcoat.2010.11.058Yuan Z.G., Yang J.F., Wang X.P., Cheng Z.J., Fang Q.F. Characterization and properties of quaternary Mo–Si–C–N coatings synthesized by magnetron sputtering technique. Surface and Coatings Technology. 2011; 205(10):3307–3312. https://doi.org/10.1016/j.surfcoat.2010.11.058Skjöldebrand C., Hulsart-Billström G., Engqvist H., Persson C. Si–Fe–C–N coatings for biomedical applications: A combinatorial approach. Materials (Basel). 2020; 13(9):2074. https://doi.org/10.3390/ma13092074Skjöldebrand C., Hulsart-Billström G., Engqvist H., Persson C. Si–Fe–C–N coatings for biomedical applications: A combinatorial approach. Materials (Basel). 2020; 13(9):2074. https://doi.org/10.3390/ma13092074Dasmahapatra A., Meletis E., Kroll P. First principles modeling and simulation of Zr–Si–B–C–N ceramics: Deve­loping hard and oxidation resistant coatings. Acta Materialia. 2017;125:246–254. https://doi.org/10.1016/j.actamat.2016.11.061Dasmahapatra A., Meletis E., Kroll P. First principles modeling and simulation of Zr–Si–B–C–N ceramics: Deve­loping hard and oxidation resistant coatings. Acta Materialia. 2017;125:246–254. https://doi.org/10.1016/j.actamat.2016.11.061Bondarev A.V., Antonyuk M.N., Kiryukhantsev-Kor­neev Ph.V., Polcar T., Shtansky D.V. Insight into high temperature performance of magnetron sputtered Si–Ta–C–(N) coatings with an ion-implanted interlayer. Appli­ed Surface Science. 2021;541:148526. https://doi.org/10.1016/j.apsusc.2020.148526Bondarev A.V., Antonyuk M.N., Kiryukhantsev-Kor­neev Ph.V., Polcar T., Shtansky D.V. Insight into high temperature performance of magnetron sputtered Si–Ta–C–(N) coatings with an ion-implanted interlayer. Appli­ed Surface Science. 2021;541:148526. https://doi.org/10.1016/j.apsusc.2020.148526Ning Z., Luo X., Zhang W., Zhang L., Lin R., He H., Ye G., Chen H., Yang J., Yang Y., Liao J., Liu N. Corrosion resistance of TaSiCN coatings in NaCl–KCl molten salt. Materials Research Express. 2019;6:106437. https://doi.org/10.1088/2053-1591/ab3ed6Ning Z., Luo X., Zhang W., Zhang L., Lin R., He H., Ye G., Chen H., Yang J., Yang Y., Liao J., Liu N. Corrosion resistance of TaSiCN coatings in NaCl–KCl molten salt. Materials Research Express. 2019;6:106437. https://doi.org/10.1088/2053-1591/ab3ed6Fischer T.E., Tomizawa H. Interaction of tribochemistry and microfracture in the friction and wear of silicon nit­ride. Wear. 1985;105(1):29–45. https://doi.org/10.1016/0043-1648(85)90004-3Fischer T.E., Tomizawa H. Interaction of tribochemistry and microfracture in the friction and wear of silicon nit­ride. Wear. 1985;105(1):29–45. https://doi.org/10.1016/0043-1648(85)90004-3Zhang Y.-L., Ren J., Tian S., Li H., Ren X., Hu Z. HfC nanowire-toughened TaSi2–TaC–SiC–Si multiphase coa­ting for C/C composites against oxidation. Corrosion Scien­ce. 2015;90:554–561. https://doi.org/10.1016/j.corsci.2014.10.048Zhang Y.-L., Ren J., Tian S., Li H., Ren X., Hu Z. HfC nanowire-toughened TaSi2–TaC–SiC–Si multiphase coa­ting for C/C composites against oxidation. Corrosion Scien­ce. 2015;90:554–561. https://doi.org/10.1016/j.corsci.2014.10.048Liu F., Li H., Gu S., Yao X., Fu Q. Ablation behavior and thermal protection performance of TaSi2 coating for SiC coated carbon/carbon composites. Ceramics Interna­tional. 2019;45(3):3256–3262. https://doi.org/10.1016/J.CERAMINT.2018.10.230Liu F., Li H., Gu S., Yao X., Fu Q. Ablation behavior and thermal protection performance of TaSi2 coating for SiC coated carbon/carbon composites. Ceramics Interna­tional. 2019;45(3):3256–3262. https://doi.org/10.1016/J.CERAMINT.2018.10.230Kumar S., Mondal S., Kumar A., Ranjan A., Prasad N.E. Chemical vapor deposition of TaC/SiC on graphite tube and its ablation and microstructure studies. Coatings. 2017;7(7):101. https://doi.org/10.3390/coatings7070101Kumar S., Mondal S., Kumar A., Ranjan A., Prasad N.E. Chemical vapor deposition of TaC/SiC on graphite tube and its ablation and microstructure studies. Coatings. 2017;7(7):101. https://doi.org/10.3390/coatings7070101Mansour A.N. Effect of temperature on microstructure and electrical properties of TaSi2 thin films grown on Si substrates. Vacuum. 2011;85(6):667–671. https://doi.org/10.1016/j.vacuum.2010.10.003Mansour A.N. Effect of temperature on microstructure and electrical properties of TaSi2 thin films grown on Si substrates. Vacuum. 2011;85(6):667–671. https://doi.org/10.1016/j.vacuum.2010.10.003Kelly P.J., Arnell R.D. Magnetron sputtering: a review of recent developments and applications. Vacuum. 2000;56(3):159–172. https://doi.org/10.1016/S0042-207X(99)00189-XKelly P.J., Arnell R.D. Magnetron sputtering: a review of recent developments and applications. Vacuum. 2000;56(3):159–172. https://doi.org/10.1016/S0042-207X(99)00189-XBorowski P., Myśliwiec J. Recent advances in magnetron sputtering: from fundamentals to industrial applications. Coatings. 2025;15(8):922. https://doi.org/10.3390/coatings15080922Borowski P., Myśliwiec J. Recent advances in magnetron sputtering: from fundamentals to industrial applications. Coatings. 2025;15(8):922. https://doi.org/10.3390/coatings15080922Braun M. Magnetron sputtering technique. In: Nee A.Y.C. (Ed.) Handbook of manufacturing engineering and technology. London: Springer, 2015. P. 2929–2957. https://doi.org/10.1007/978-1-4471-4670-4_28Braun M. Magnetron sputtering technique. In: Nee A.Y.C. (Ed.) Handbook of manufacturing engineering and technology. London: Springer, 2015. P. 2929–2957. https://doi.org/10.1007/978-1-4471-4670-4_28Sarakinos K., Alami J., Konstantinidis S. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art. Surface and Coatings Techno­logy. 2010;204(11):1661–1684. https://doi.org/10.1016/j.surfcoat.2009.11.013Sarakinos K., Alami J., Konstantinidis S. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art. Surface and Coatings Techno­logy. 2010;204(11):1661–1684. https://doi.org/10.1016/j.surfcoat.2009.11.013Vetter J., Shimizu T., Kurapov D., Sasaki T., Mueller J., Stangier D., Esselbach M. Industrial application potential of high power impulse magnetron sputtering for wear and corrosion protection coatings. Journal of Applied Physics. 2023;134(16):160701. https://doi.org/10.1063/5.0159292Vetter J., Shimizu T., Kurapov D., Sasaki T., Mueller J., Stangier D., Esselbach M. Industrial application potential of high power impulse magnetron sputtering for wear and corrosion protection coatings. Journal of Applied Physics. 2023;134(16):160701. https://doi.org/10.1063/5.0159292Chang C.-L., Lo K.-C., Yang F.-C., Shen G.-L., Tang J.-F. HiPIMS co-sputtering for the increase of the mechanical properties of arc deposited TiN coatings. Journal of Ma­terials Research and Technology. 2023;26:2050–2059. https://doi.org/10.1016/j.jmrt.2023.08.070Chang C.-L., Lo K.-C., Yang F.-C., Shen G.-L., Tang J.-F. HiPIMS co-sputtering for the increase of the mechanical properties of arc deposited TiN coatings. Journal of Ma­terials Research and Technology. 2023;26:2050–2059. https://doi.org/10.1016/j.jmrt.2023.08.070Bondarev A.V., Vorotilo S., Shchetinin I.V., Leva­shov E.A., Shtansky D.V. Fabrication of Ta–Si–C targets and their utilization for deposition of low friction wear resistant nanocomposite Si–Ta–C–(N) coatings intended for wide temperature range tribological applications. Surface and Coatings Technology. 2019;359:342–353. https://doi.org/10.1016/j.surfcoat.2018.12.030Bondarev A.V., Vorotilo S., Shchetinin I.V., Leva­shov E.A., Shtansky D.V. Fabrication of Ta–Si–C targets and their utilization for deposition of low friction wear resistant nanocomposite Si–Ta–C–(N) coatings intended for wide temperature range tribological applications. Surface and Coatings Technology. 2019;359:342–353. https://doi.org/10.1016/j.surfcoat.2018.12.030Kiryukhantsev-Korneev P.V., Sytchenko A.D., Sviri­dova T.A., Sidorenko D.A., Andreev N.V., Klechkovs­kaya V.V., Polčak J., Levashov E.A. Effects of doping with Zr and Hf on the structure and properties of Mo–Si–B coatings obtained by magnetron sputtering of compo­site targets. Surface and Coatings Technology. 2022; 442:128141. https://doi.org/10.1016/j.surfcoat.2022.128141Kiryukhantsev-Korneev P.V., Sytchenko A.D., Sviri­dova T.A., Sidorenko D.A., Andreev N.V., Klechkovs­kaya V.V., Polčak J., Levashov E.A. Effects of doping with Zr and Hf on the structure and properties of Mo–Si–B coatings obtained by magnetron sputtering of compo­site targets. Surface and Coatings Technology. 2022; 442:128141. https://doi.org/10.1016/j.surfcoat.2022.128141Кирюханцев-Корнеев Ф.В. Возможности оптической эмиссионной спектроскопии тлеющего разряда GDOES при исследовании покрытий. Известия вузов. Порошковая металлургия и функциональные покрытия. 2013;(2):60–70. https://doi.org/10.17073/1997-308X-2013-2-60-70Kiryukhantsev-Korneev F.V. Possibilities of glow discharge optical emission spectroscopy in the investigation of coatings. Russian Journal of Non-Ferrous Metals. 2014;55:494–504. https://doi.org/10.3103/S1067821214050137Patidar J., Pshyk O., Thorwarth K., Sommerhäuser L., Siol S. Low temperature deposition of functional thin films on insulating substrates enabled by selective ion accele­ration using synchronized floating potential HiPIMS. Nature Communications. 2025;16:4719. https://doi.org/10.1038/s41467-025-59911-yPatidar J., Pshyk O., Thorwarth K., Sommerhäuser L., Siol S. Low temperature deposition of functional thin films on insulating substrates enabled by selective ion accele­ration using synchronized floating potential HiPIMS. Nature Communications. 2025;16:4719. https://doi.org/10.1038/s41467-025-59911-ySchoof M.R., Aghda S.K., Kusche C.F., Hans M., Schneider J.M., Korte-Kerzel S., Gibson J.S.K.-L. The influen­ce of microstructural orientation on fracture toughness in (V, Al)N and (V, Al)(O, N) coatings as measured by microcantilever bending. Journal of Materials Research. 2023;38:3950–3965. https://doi.org/10.1557/s43578-023-01111-9Schoof M.R., Aghda S.K., Kusche C.F., Hans M., Schneider J.M., Korte-Kerzel S., Gibson J.S.K.-L. The influen­ce of microstructural orientation on fracture toughness in (V, Al)N and (V, Al)(O, N) coatings as measured by microcantilever bending. Journal of Materials Research. 2023;38:3950–3965. https://doi.org/10.1557/s43578-023-01111-9Panjan P., Miletić A., Drnovšek A., Terek P., Čekada M., Kovačević L., Panjan M. Cracking resistance of selected PVD hard coatings. Coatings. 2024;14(11):1452. https://doi.org/10.3390/coatings14111452Panjan P., Miletić A., Drnovšek A., Terek P., Čekada M., Kovačević L., Panjan M. Cracking resistance of selected PVD hard coatings. Coatings. 2024;14(11):1452. https://doi.org/10.3390/coatings14111452Depla D., De Gryse R. Target poisoning during reactive magnetron sputtering: Part I: The influence of ion implantation. Surface and Coatings Technology. 2004; 183(2–3): 184–189. https://doi.org/10.1016/j.surfcoat.2003.10.006Depla D., De Gryse R. Target poisoning during reactive magnetron sputtering: Part I: The influence of ion implantation. Surface and Coatings Technology. 2004; 183(2–3): 184–189. https://doi.org/10.1016/j.surfcoat.2003.10.006Ding J., Zhang T., Mei H., Yun J.M., Jeong S.H., Wang Q., Kim K.H. Effects of negative bias voltage and ratio of nit­rogen and argon on the structure and properties of NbN coatings deposited by HiPIMS deposition system. Coa­tings. 2018;8(1):10. https://doi.org/10.3390/coatings8010010Ding J., Zhang T., Mei H., Yun J.M., Jeong S.H., Wang Q., Kim K.H. Effects of negative bias voltage and ratio of nit­rogen and argon on the structure and properties of NbN coatings deposited by HiPIMS deposition system. Coa­tings. 2018;8(1):10. https://doi.org/10.3390/coatings8010010Zhang G.A., Yan P.X., Wang P., Chen Y.M., Zhang J.Y. Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films. Materials Science and Engineering: A. 2007;460–461:301–305. https://doi.org/10.1016/j.msea.2007.01.149Zhang G.A., Yan P.X., Wang P., Chen Y.M., Zhang J.Y. Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films. Materials Science and Engineering: A. 2007;460–461:301–305. https://doi.org/10.1016/j.msea.2007.01.149Chawla V., Jayaganthan R., Chandra R. A study of structural and mechanical properties of sputter deposited nanocomposite Ti–Si–N thin films. Surface and Coatings Technology. 2010;204(9–10):1582–1589. https://doi.org/10.1016/j.surfcoat.2009.10.001Chawla V., Jayaganthan R., Chandra R. A study of structural and mechanical properties of sputter deposited nanocomposite Ti–Si–N thin films. Surface and Coatings Technology. 2010;204(9–10):1582–1589. https://doi.org/10.1016/j.surfcoat.2009.10.001Leyland A., Matthews A. On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behavior. Wear. 2000;246(1–2): 1–11. https://doi.org/10.1016/S0043-1648(00)00488-9Leyland A., Matthews A. On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behavior. Wear. 2000;246(1–2): 1–11. https://doi.org/10.1016/S0043-1648(00)00488-9Beake B.D. The influence of the H/E ratio on wear resistance of coating systems – insights from small-scale testing. Surface and Coatings Technology. 2022;442:128272. https://doi.org/10.1016/j.surfcoat.2022.128272Beake B.D. The influence of the H/E ratio on wear resistance of coating systems – insights from small-scale testing. Surface and Coatings Technology. 2022;442:128272. https://doi.org/10.1016/j.surfcoat.2022.128272Glechner T., Mayrhofer P.H., Holec D., Fritze S., Lewin E., Paneta V., Primetzhofer D., Kolozsvári S., Riedl H. Tu­ning structure and mechanical properties of Ta–C coatings by N-alloying and vacancy population. Scientific Reports. 2018;8:17669. https://doi.org/10.1038/s41598-018-35870-xGlechner T., Mayrhofer P.H., Holec D., Fritze S., Lewin E., Paneta V., Primetzhofer D., Kolozsvári S., Riedl H. Tu­ning structure and mechanical properties of Ta–C coatings by N-alloying and vacancy population. Scientific Reports. 2018;8:17669. https://doi.org/10.1038/s41598-018-35870-xDu S., Gao M., Wang S., Zhao X., Zhang S., Huo C., Hua P., Jia Y., Wen M., Zhao Z. Influence of Si-addition on tribological and corrosion properties of Ta–Si–C coa­tings. Ceramics International. 2025;51(1):1346–1353. https://doi.org/10.1016/j.ceramint.2024.11.160Du S., Gao M., Wang S., Zhao X., Zhang S., Huo C., Hua P., Jia Y., Wen M., Zhao Z. Influence of Si-addition on tribological and corrosion properties of Ta–Si–C coa­tings. Ceramics International. 2025;51(1):1346–1353. https://doi.org/10.1016/j.ceramint.2024.11.160Чертова А.Д., Бондарев А.В., Левашов Е.А., Кирюханцев-Корнеев Ф.В. Трибологические свойства покрытий Ta–Si–C–N, полученных методом магнетронного напыления. Физикохимия поверхности и защита материалов. 2025;61(3):263–268. https://doi.org/10.31857/S0044185625030054Chertova A.D., Bondarev A.V., Levashov E.A., Kiryukhantsev-Korneev F.V. Tribological properties of Ta–Si–C–N coatings obtained by magnetron sputtering. Protection of Metals and Physical Chemistry Surface. 2025;61:847–852. https://doi.org/10.1134/S2070205125700789Kiryukhantsev-Korneev Ph.V., Pierson J.F., Bychkova M.Y., Manakova O.S., Levashov E.A., Shtansky D.V. Comparative study of sliding, scratching, and impact-loading behavior of hard CrB2 and Cr–B–N films. Tribo­logy Letters. 2016;63:44. https://doi.org/10.1007/s11249-016-0729-0Kiryukhantsev-Korneev Ph.V., Pierson J.F., Bychkova M.Y., Manakova O.S., Levashov E.A., Shtansky D.V. Comparative study of sliding, scratching, and impact-loading behavior of hard CrB2 and Cr–B–N films. Tribo­logy Letters. 2016;63:44. https://doi.org/10.1007/s11249-016-0729-0Zhao F., Zhu Z., Yu J., Luo Z., Qi H. Contrast role of third body layer and hard abrasives in the wear process of a TiAlSiN hardness-modulated multilayer coating: A case study on the effect of normal load and velocity. Coatings. 2024;14(7):821. https://doi.org/10.3390/coatings14070821Zhao F., Zhu Z., Yu J., Luo Z., Qi H. Contrast role of third body layer and hard abrasives in the wear process of a TiAlSiN hardness-modulated multilayer coating: A case study on the effect of normal load and velocity. Coatings. 2024;14(7):821. https://doi.org/10.3390/coatings14070821Tatsumi G., Ratoi M., Shitara Y., Hasegawa S., Sakamoto K., Mellor B.G. Mechanism of oil-lubrication of PEEK and its composites with steel counterparts. Wear. 2021;486–487:204085. https://doi.org/10.1016/j.wear.2021.204085Tatsumi G., Ratoi M., Shitara Y., Hasegawa S., Sakamoto K., Mellor B.G. Mechanism of oil-lubrication of PEEK and its composites with steel counterparts. Wear. 2021;486–487:204085. https://doi.org/10.1016/j.wear.2021.204085

The authors declare that there are no conflicts of interest present.