powderИзвестия вузов. Порошковая металлургия и функциональные покрытияPowder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya)1997-308X2412-8767НИТУ "МИСИС"10.17073/1997-308X-2018-4-92-103powder-409Research ArticleНаноструктурированные материалы и функциональные покрытияNanostructured Materials and Functional CoatingsГибридная технология осаждения твердых износостойких покрытий, сочетающая процессы электроискрового легирования, катодно-дугового испарения и магнетронного напыленияHybrid technology combining electrospark alloying, cathodic arc evaporation and magnetron sputtering for hard wear-resistant coating depositionШевейкоА. Н.SheveykoA. N.

Hауч. сотр. Научно-учебного центра (НУЦ) СВС.

119049, г. Москва, Ленинский пр-т, 4.

Research scientist of the Scientific-educational Centre of SHS.

119049, Russia, Moscow, Leninskii pr., 4.

sheveyko@mail.ruКупцовК. А.KuptsovK. A.

Канд. техн. наук, мл. науч. сотр. НУЦ СВС.

119049, г. Москва, Ленинский пр-т, 4.

Cand. Sci. (Tech.), junior research scientist of the Scientific-educational Centre of SHS.

119049, Russia, Moscow, Leninskii pr., 4.

koster_koster@mail.ruКирюханцев-КорнеевФ. В.Kiryukhantsev-KorneevPh. V.

Канд. техн. наук, вед. науч. сотр. НУЦ СВС; доцент кафедры порошковой металлургии и функциональных покрытий (ПМиФП).

119049, г. Москва, Ленинский пр-т, 4.

Cand. Sci. (Tech.), leading research scientist of the Scientific-educational Centre of SHS, associate prof. of the Department of powder metallurgy and functional coatings (PM&FC).

119049, Russia, Moscow, Leninskii pr., 4.

kiruhancev-korneev@yandex.ruЛевашовА. E.LevashovE. A.

Докт. техн. наук, акад. РАЕН, проф., директор НУЦ СВС; зав. кафедрой ПМиФП.

119049, г. Москва, Ленинский пр-т, 4.

Dr. Sci. (Tech.), prof., acad. of Russian Academy of Natural Science, head of Scientific-educational Centre of SHS.

119049, Russia, Moscow, Leninskii pr., 4.

levashov@shs.misis.ruШтанскийД. В.ShtanskyD. V.

Докт. физ.-мат. наук, гл. науч. сотр. НУЦ СВС; проф. кафедры ПМиФП; зав. науч.-исслед. лабораторией «Неорганические наноматериалы».

Dr. Sci. (Phys.-Math.), principal scientist of the Scientific-educational Centre of SHS, prof. of the Department of PM&FC, head of the Research laboratory «Inorganic nanomaterials».

119049, Russia, Moscow, Leninskii pr., 4.

shtansky@shs.misis.ruНациональный исследовательский технологический университет (НИТУ) «МИСиС».РоссияNational University of Science and Technology (NUST) «MISIS».Russian Federation2018141220180492103Copyright © НИТУ "МИСИС", 20182018НИТУ "МИСИС"НИТУ "МИСИС"https://powder.misis.ru/jour/about/submissions#copyrightNoticehttps://powder.misis.ru/jour/article/view/409

Предложена оригинальная технология нанесения многослойных покрытий, совмещающая в одном вакуумном технологическом процессе электроискровое легирование (ЭИЛ), импульсное дуговое испарение (ИДИ) и магнетронное распыление (МР). Слои могут наноситься с использованием одного электродного материала при рабочих давлениях от 0,1 Па до атмосферного. Нижний ЭИЛ-слой обеспечивает повышение жесткости основы, идеальную адгезию и относительно большую (до 100 мкм) толщину покрытия. Верхний ИДИ- или МР-слой, толщиной до 10 мкм, определяет высокие механические и трибологические характеристики. Технология осаждения двухслойных ИДИ–ЭИЛ- и МР–ЭИЛ-покрытий апробирована на подложках из конструкционных и инструментальных сталей, титановых сплавов при использовании электродов из твердых сплавов (WC–Co, TiCNiAl) и углерода (малопористого графита).

The novel technology of multilayer coating deposition combining electric-spark alloying (ESA), pulsed arc evaporation (PAE), and magnetron sputtering (MS) in one vacuum process is presented. Layers can be deposited using a single electrode material at operating pressures from 0,1 Pa to atmospheric pressure. The lower ESA layer provides increased substrate toughness, perfect adhesion and a relatively high (up to 100 μm) coating thickness. The upper PAE or MS layer up to 10 μm in thickness provides high mechanical and tribological characteristics. The technology of double-layer PAE–ESA and MS–ESA coating deposition was tested on substrates made of structural and tool steels, titanium alloys using electrodes of cemented carbides (WC–Co, TiCNiAl) and carbon (low-porous graphite).

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The authors declare that there are no conflicts of interest present.