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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">powder</journal-id><journal-title-group><journal-title xml:lang="ru">Известия вузов. Порошковая металлургия и функциональные покрытия</journal-title><trans-title-group xml:lang="en"><trans-title>Powder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya)</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1997-308X</issn><issn pub-type="epub">2412-8767</issn><publisher><publisher-name>НИТУ "МИСИС"</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.17073/1997-308X-2022-2-61-69</article-id><article-id custom-type="elpub" pub-id-type="custom">powder-700</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Наноструктурированные материалы и функциональные покрытия</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>Nanostructured Materials and Functional Coatings</subject></subj-group></article-categories><title-group><article-title>Структура и свойства покрытий Mo–Hf–Si–B, полученных методом магнетронного распыления с использованием мозаичной мишени MoSiB/Hf</article-title><trans-title-group xml:lang="en"><trans-title>Structure and properties of Mo–Hf–Si–B coatings obtained by magnetron sputtering using MoSiB/Hf mosaic target</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Сытченко</surname><given-names>А. Д.</given-names></name><name name-style="western" xml:lang="en"><surname>Sytchenko</surname><given-names>A. D.</given-names></name></name-alternatives><bio xml:lang="ru"><p>мл. науч. сотрудник Научно-учебного центра (НУЦ) СВС МИСиС–ИСМАН</p><p>119991, г. Москва, Ленинский пр-т, 4</p></bio><bio xml:lang="en"><p>Junior research scientist, Scientific-Educational Center of SHS of MISIS–ISMAN</p><p>119991, Moscow, Leninskii pr., 4</p></bio><email xlink:type="simple">alina-sytchenko@yandex.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Левашов</surname><given-names>Е. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Levashov</surname><given-names>E. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>докт. техн. наук, акад. РАЕН, проф., директор НУЦ СВС МИСиС–ИСМАН, зав. кафедрой порошковой металлургии и функциональных покрытий (ПМиФП)</p><p>г. Москва</p><p> </p></bio><bio xml:lang="en"><p>Dr. Sci. (Tech.), Prof., Acad. of Russian Academy of Natural Science, Head of Scientific-Educational Center of SHS of MISIS–ISMAN, Head of the Department of powder metallurgy and functional coatings (PM&amp;FC)</p><p>Moscow</p></bio><email xlink:type="simple">levashov@shs.misis.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Кирюханцев-Корнеев</surname><given-names>Ф. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Kiryukhantsev-Korneev</surname><given-names>Ph. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>канд. техн. наук, доцент кафедры ПМиФП, зав. лабораторией «In situ диагностика структурных превращений» НУЦ СВС МИСиС–ИСМАН</p><p>г. Москва</p></bio><bio xml:lang="en"><p>Cand. Sci. (Eng.), Associate prof., Department of PM&amp;FC; Head of the laboratory «In situ diagnostics of structural transformations» of Scientific-Educational of Center SHS, MISIS–ISMAN</p><p>Moscow</p></bio><email xlink:type="simple">kiruhancev-korneev@yandex.ru</email><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Национальный исследовательский технологический университет (НИТУ) «МИСиС»</institution><country>Россия</country></aff><aff xml:lang="en"><institution>National University of Science and Technology «MISIS» (NUST «MISIS»)</institution><country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2022</year></pub-date><pub-date pub-type="epub"><day>16</day><month>06</month><year>2022</year></pub-date><volume>0</volume><issue>2</issue><fpage>61</fpage><lpage>69</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Сытченко А.Д., Левашов Е.А., Кирюханцев-Корнеев Ф.В., 2022</copyright-statement><copyright-year>2022</copyright-year><copyright-holder xml:lang="ru">Сытченко А.Д., Левашов Е.А., Кирюханцев-Корнеев Ф.В.</copyright-holder><copyright-holder xml:lang="en">Sytchenko A.D., Levashov E.A., Kiryukhantsev-Korneev P.V.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://powder.misis.ru/jour/article/view/700">https://powder.misis.ru/jour/article/view/700</self-uri><abstract><p>Покрытия Mo–Si–B и Mo–Hf–Si–B были получены методом магнетронного распыления керамической мишени MoSiB, оснащенной 2 или 4 сегментами Hf. Их структура и состав исследовались методами сканирующей электронной микроскопии, энергодисперсионной спектроскопии, рентгенофазового анализа и спектроскопии комбинационного рассеяния света. Механические свойства определялись путем наноиндентирования при нагрузке 4 Н. Трещиностойкость покрытий исследовалась на микротвердомере при нагрузках 0,25–1,0 Н. Кинетика окисления изучалась при температуре 1000 °С на воздухе с суммарной выдержкой 300 мин. Жаростойкость покрытий определялась в результате кратковременных отжигов при температуре 1500 °С. Электрохимические испытания проводились методом вольтамперометрии в 1N растворе H2SO4. Результаты показали, что покрытие Mo–Si–B и покрытие Mo–Hf–Si–B, полученное с использованием 2 сегментов Hf, характеризуются столбчатой структурой. Применение 4 сегментов Hf при осаждении покрытий привело к увеличению плотности и подавлению образования нежелательной столбчатой структуры. Показано, что введение гафния в состав покрытий увеличивает скорость роста на 20 % и на порядок снижает размер зерен основной составляющей фазы h-MoSi2, одновременно способствуя образованию HfB2. Максимальные твердость (27 ГПа), модуль Юнга (370 ГПа) и упругое восстановление (62 %) были достигнуты для покрытия Mo–Si–B. Твердость покрытий, полученных с использованием 2 и 4 сегментов Hf, снизилась в 1,9 и 1,6 раза соответственно. При микроиндентировании покрытий Mo–Si–B и Mo–Hf–Si–B (2Hf) наблюдалось образование радиальных трещин. Образец, полученный с максимальной концентрацией гафния, обладал лучшей трещиностойкостью. Электрохимические испытания выявили, что коррозионная стойкость покрытий возрастает в ряду Mo–Hf–Si–B (2Hf) → Mo–Si–B → Mo–Hf–Si–B (4Hf). Все они показали хорошую стойкость к окислению при температурах 1000 и 1500°С. Однако на поверхности образцов Mo–Si–B и Mo–Hf–Si–B (2Hf) наблюдались участки отслоения покрытия. Покрытие Mo–Hf–Si–B (4Hf) продемонстрировало меньшую толщину оксидного слоя и лучшую стойкость к окислению из-за образования плотного защитного слоя SiO2 + HfOх.</p></abstract><trans-abstract xml:lang="en"><p>Mo–Si–B and Mo–Hf–Si–B coatings were produced by magnetron sputtering of a MoSiB ceramic target equipped with 2 or 4 Hf segments. Their structure and composition were studied by scanning electron microscopy, energy dispersive spectro scopy, X-ray diffraction analysis, and Raman spectroscopy. Mechanical properties were determined by nanoindentation at a load of 4 N. The crack resistance of coatings was studied on a microhardness tester at loads of 0.25–1.0 N. The oxidation kinetics was studied at 1000 °C in air with a total exposure of 300 min. The heat resistance of coatings was determined as a result of short-term annealing at 1500 °C. Electrochemical tests were carried out by voltammetry in the 1N H2SO4 solution. The results showed that the Mo–Si–B coating and Mo–Hf–Si–B coating obtained using 2 Hf segments feature by a columnar structure. The use of 4Hf segments in coating deposition led to an increase in density and suppression of the undesirable columnar structure formation. It was shown that hafnium introduction into the coating composition increases the growth rate by 20% and reduces the grain size of the main component of the h-MoSi2 phase by an order of magnitude, while simultaneously promoting HfB2 formation. Maximum hardness (27 GPa), Young’s modulus (370 GPa) and elastic recovery (62 %) were achieved for the Mo-Si-B coating. The hardness of coatings obtained using 2 and 4 Hf segments decreases by 1.9 and 1.6 times, respectively. During the Mo–Si–B and Mo–Hf–Si–B (2Hf) coating microindentation, radial cracking was observed. The sample obtained with the maximum concentration of hafnium featured by the best crack resistance. Electrochemical tests showed that the corrosion resistance of coatings increases in the Mo–Hf–Si–B (2Hf) → Mo–Si–B → Mo–Hf–Si–B (4Hf) series. All coatings showed good oxidation resistance at 1000 and 1500 °C. However, coating delamination areas were observed on the surface of Mo–Si–B and Mo–Hf–Si–B (2Hf) samples. The Mo–Hf–Si–B (4Hf) coating showed a lower oxide layer thickness and better oxidation resistance due to the dense SiO2 + HfOх protective layer formation.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>Mo–Hf–Si–B</kwd><kwd>магнетронное напыление</kwd><kwd>покрытия</kwd><kwd>трещиностойкость</kwd><kwd>жаростойкость</kwd><kwd>коррозионная стойкость</kwd></kwd-group><kwd-group xml:lang="en"><kwd>Mo–Hf–Si–B</kwd><kwd>magnetron sputtering</kwd><kwd>coatings</kwd><kwd>crack resistance</kwd><kwd>oxidation resistance</kwd><kwd>corrosion resistance</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Работа выполнена при финансовой поддержке Российского научного фонда (проект № 19-19-00117-П). Авторы признательны сотрудникам НУЦ СВС МИСиС—ИСМАН – Н.В. Швындиной за помощь в проведении структурных исследований покрытий и М.И. Петржику за проведение испытаний методами наноиндентирования.</funding-statement><funding-statement xml:lang="en">The research was funded by the Russian Science Foundation (Project № 19-19-00117-П). The authors thank researchers of the MISIS–ISMAN SHS Research and Education Center — N.V. Shvyndina for assistance in structural studies of coatings and M.I. Petrzhik for nanoindentation studies.</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Wen S.H., Sha J.B. Isothermal and cyclic oxidation behaviours of MoSi2 with additions of B at 1250 °C prepared by spark plasma sintering. Mater. Charact. 2018. Vol. 139. P. 134—143.</mixed-citation><mixed-citation xml:lang="en">Wen S.H., Sha J.B. Isothermal and cyclic oxidation behaviours of MoSi2 with additions of B at 1250 °C prepared by spark plasma sintering. Mater. Charact. 2018. Vol. 139. 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