powderИзвестия вузов. Порошковая металлургия и функциональные покрытияPowder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya)1997-308X2412-8767НИТУ "МИСИС"10.17073/1997-308X-2023-2-62-70powder-788Research ArticleНаноструктурированные материалы и функциональные покрытияNanostructured Materials and Functional CoatingsИсследование триботехнических характеристик покрытий Ta–Zr–Si–B–C–NInvestigation of the tribological characteristics of Ta–Zr–Si–B–C–N coatingshttps://orcid.org/0000-0002-8668-5877СытченкоА. Д.SytchenkoA. D.

Алина Дмитриевна Сытченко – младший научный сотрудник лаборатории «In situ диагностика структурных превращений» научно-­учебного центра (НУЦ) СВС, МИСИС–ИСМАН, Национальный исследовательский технологический университет (НИТУ) «МИСИС».

119049, Москва, Ленинский пр-т, 4, стр. 1

Alina D. Sytchenko – Junior Research Scientist of the “In situ Diag­ nostics of Structural Transformations” Laboratory of Scientific­Edu­ cational Center of Self­Propagating High­Temperature Synthesis (SHS), MISIS–ISMAN, National University of Science and Technology (NUST) “MISIS”.

4 bld.1 Leninskiу Prosp., Moscow 119049

alina-sytchenko@yandex.ruВахрушевР. А.VakhrushevR. A.

Роман Алексеевич Вахрушев – магистрант, лаборант­исследователь лаборатории «In situ диагностика структурных превращений», НУЦ СВС, МИСИС­ИСМАН.

119049, Москва, Ленинский пр-т, 4, стр. 1

Roman A. Vakhrushev – MSc, Laboratory Assistant Researcher of the “In situ Diagnostics of Structural Transformations” Laboratory of Scientific­Educational Center of SHS, MISIS–ISMAN.

4 bld.1 Leninskiу Prosp., Moscow 119049

romavahaa@gmail.comhttps://orcid.org/0000-0003-1635-4746Кирюханцев-КорнеевФ. В.Kiryukhantsev-KorneevPh. V.

Филипп Владимирович Кирюханцев-Корнеев – кандидат технических наук, доцент кафедры порошковой металлургии и функциональных покрытий НИТУ МИСИС; зав. лабораторией «In situ диагностика структурных превращений», НУЦ СВС, МИСИС–ИСМАН.

119049, Москва, Ленинский пр-т, 4, стр. 1

Philipp V. Kiryukhantsev-Korneev – Cand. Sci. (Eng.), Associate Professor, Department of Powder Metallurgy and Functional Coa­ tings of NUST “MISIS”; Head of the “In situ Diagnostics of Structural Transformations” Laboratory of Scientific­Educational Center of SHS, MISIS–ISMAN.

4 bld.1 Leninskiу Prosp., Moscow 119049

kiruhancev-korneev@yandex.ruНациональный исследовательский технологический университет «МИСИС»РоссияNational University of Science and Technology “MISIS”Russian Federation2023060620231726270Copyright © НИТУ "МИСИС", 20232023НИТУ "МИСИС"НИТУ "МИСИС"https://powder.misis.ru/jour/about/submissions#copyrightNoticehttps://powder.misis.ru/jour/article/view/788

Покрытия Ta–Zr–Si–B–C–N были нанесены методом магнетронного распыления с использованием композиционной мишени TaSi2–Ta3B4–(Ta, Zr)B2 . В качестве рабочего газа использовали Ar, а также смеси газов Ar + N2 и Ar + C2H4 . Структуру и состав покрытий исследовали методами сканирующей электронной микроскопии, оптической эмиссионной спектроскопии тлеющего разряда и рентгенофазового анализа. Толщину и стойкость покрытий к абразивному воздействию оценивали по схеме «шарик–шлиф». Испытания на эрозионную стойкость проводили с использованием ультразвукового диспергатора УЗДН-2Т (Россия). Трибологические испытания в режиме трения–скольжения осуществляли на автоматизированной машине трения HT Tribometer («CSM Instruments», Швейцария). Зону износа после трибологических испытаний исследовали с помощью оптического профилометра Wyko 1100 («Veeco», США). Результаты показали, что покрытие Ta–Zr–Si–B характеризуется столбчатой структурой с размером кристаллитов h-TaSi2 порядка 11 нм. Введение азота и углерода в состав покрытий привело к подавлению столбчатого роста и снижению размера кристаллитов h-TaSi2 в 2–4 раза. Лучшую абразивную и эрозионную стойкость показали углеродсодержащие покрытия. Испытания на трение–скольжение показали, что покрытие Ta–Zr–Si–B характеризуется стабильным коэффициентом трения на уровне 0,3, начиная с 25 °С и до максимальной рабочей температуры 250 °С. Введение азота привело к росту коэффициента трения до значений 0,8–1,0 при t = 50÷110 °С. Покрытие с минимальной концентрацией углерода показало стабильный коэффициент трения ~0,3 до максимальной температуры 250 °С. Наилучший результат продемонстрировал образец, содержащий наибольшее количество углерода: его коэффициент трения сохранялся на уровне 0,25 до температуры 350 °С.

Ta–Zr–Si–B–C–N coatings were deposited by magnetron sputtering using a TaSi2–Ta3B4–(Ta, Zr)B2 composite target. Ar, as well as Ar + N2 and Ar + C2H4 gas mixtures, were used as the working gas. The structure and composition of the coatings were studied by scanning electron microscopy, glow-discharge optical emission spectroscopy, and X-ray diffraction. A Calowear tester was used to measure the thickness and abrasion resistance of the coatings. Erosion resistance tests were carried out using a UZDN-2T (Russia) ultrasonic disperser. Tribological tests in the sliding friction mode were carried out on an HT Tribometer (CSM Instruments, Switzerland) automated friction machine. The wear zone after tribological testing was examined using a Veeco Wyko 1100 (Veeco, USA) optical profiler. The results showed that the Ta–Zr–Si–B coating was characterised by a columnar structure with an h-TaSi2 crystallite size of 11 nm. The introduction of nitrogen and carbon into the composition of the coatings led to the suppression of columnar growth and a ~2–4-fold decrease in the size of h-TaSi2 crystallites. Carboncontaining coatings demonstrated the best abrasive resistance. The sliding friction tests showed that the Ta–Zr–Si–B coating is characterised by a stable coefficient of friction of 0.3 at a temperature of 25 °C up to the maximum working temperature of 250 °C. The introduction of nitrogen led to an increase in the coefficient of friction up to 0.8–1.0 at a t = 50÷110 °С. The coating with the minimum carbon concentration showed a stable coefficient of friction of ~0.3 up to a maximum temperature of 250 °C. The best result was demonstrated by the sample containing the maximum amount of carbon, with its coefficient of friction remaining at the 0.25 level up to a temperature of 350 °C.

магнетронное напылениепокрытияTaSi2ZrB2абразивная и эрозионная стойкостьвысокотемпературная трибологияmagnetron sputteringcoatingsTaSi2ZrB2abrasion and erosion resistancehigh-temperature tribologyРабота выполнена при финансовой поддержке Российского научного фонда (проект 19-19-00117-П). Авторы признательны ведущему инженеру Н.В. Швындиной (НИТУ МИСИС) за помощь в проведении структурных исследований.This work was carried out with the financial support of the Russian Science Foundation (project 19-19-00117-П). The authors are grateful to Senior Engineer N.V. Shvyndina (NUST MISIS) for the help in the structural studiesReferencesСамсонов Г.В., Дворина Л.А., Рудь Б.М. Силициды. Т. 1. М.: Металлургия, 1979. 272 с.Самсонов Г.В., Дворина Л.А., Рудь Б.М. Силициды. Т. 1. М.: Металлургия, 1979. 272 с.Schultes G., Schmitt M., Goettel D., Freitag-Weber O. Strain sensitivity of TiB2, TiSi2, TaSi2 and WSi2 thin films as possible candidates for high temperature strain gauges. Sensors and Actuators A: Physical. 2006;126(2):287–291. http://doi.org/10.1016/j.sna.2005.05.023Schultes G., Schmitt M., Goettel D., Freitag-Weber O. Strain sensitivity of TiB2, TiSi2, TaSi2 and WSi2 thin films as possible candidates for high temperature strain gauges. Sensors and Actuators A: Physical. 2006;126(2):287–291. http://doi.org/10.1016/j.sna.2005.05.023Sciti D., Silvestroni L., Celotti G., Melandri C., Guicciardi S. Sintering and mechanical properties of ZrB2–TaSi2 and HfB2–TaSi2 ceramic composites. Journal of the American Ceramic Society. 2008;91(10):3285–3291. http://doi.org/10.1111/j.1551-2916.2008.02593.xSciti D., Silvestroni L., Celotti G., Melandri C., Guicciardi S. Sintering and mechanical properties of ZrB2–TaSi2 and HfB2–TaSi2 ceramic composites. Journal of the American Ceramic Society. 2008;91(10):3285–3291. http://doi.org/10.1111/j.1551-2916.2008.02593.xShon I.J., Ko I.Y., Chae S.M., Na K.I. Rapid consolidation of nanostructured TaSi2 from mechanochemically synthesized powder by high frequency induction heated sintering. Ceramics International. 2011;37(2):679–682. https://doi.org/10.1016/j.ceramint.2010.09.054Shon I.J., Ko I.Y., Chae S.M., Na K.I. Rapid consolidation of nanostructured TaSi2 from mechanochemically synthesized powder by high frequency induction heated sintering. Ceramics International. 2011;37(2):679–682. https://doi.org/10.1016/j.ceramint.2010.09.054Niu Y., Huang L., Zhai C., Zeng Y., Zheng X., Ding C. Microstructure and thermal stability of TaSi2 coating fabricated by vacuum plasma spray. Surface and Coatings Technology. 2015;279:1–8. https://doi.org/10.1016/j.surfcoat.2015.08.025Niu Y., Huang L., Zhai C., Zeng Y., Zheng X., Ding C. Microstructure and thermal stability of TaSi2 coating fabricated by vacuum plasma spray. Surface and Coatings Technology. 2015;279:1–8. https://doi.org/10.1016/j.surfcoat.2015.08.025Blanquet E., Vahlas C., Madar R., Palleau J., Torres J., Bernard C. A thermodynamic and experimental approach to TaSi2 chemical vapour deposition. Thin Solid Films. 1989;177(1):189–206. http://doi.org/10.1016/0040-6090(89)90567-1Blanquet E., Vahlas C., Madar R., Palleau J., Torres J., Bernard C. A thermodynamic and experimental approach to TaSi2 chemical vapour deposition. Thin Solid Films. 1989;177(1):189–206. http://doi.org/10.1016/0040-6090(89)90567-1Mansour A.N. Effect of temperature on microstructure and electrical properties of TaSi2 thin films grown on Si substrates. Vacuum. 2011;85(6):667–671. https://doi.org/10.1016/j.vacuum.2010.10.003Mansour A.N. Effect of temperature on microstructure and electrical properties of TaSi2 thin films grown on Si substrates. Vacuum. 2011;85(6):667–671. https://doi.org/10.1016/j.vacuum.2010.10.003Zhang M., Ren X., Chu H., Lv J., Li W., Wang W., Yang Q., Feng P. Oxidation inhibition behaviors of the HfB2–SiC– TaSi2 coating for carbon structural materials at 1700 °C. Corrosion Science. 2020;177:108982. https://doi.org/10.1016/j.corsci.2020.108982Zhang M., Ren X., Chu H., Lv J., Li W., Wang W., Yang Q., Feng P. Oxidation inhibition behaviors of the HfB2–SiC– TaSi2 coating for carbon structural materials at 1700 °C. Corrosion Science. 2020;177:108982. https://doi.org/10.1016/j.corsci.2020.108982Liu F., Li H., Gu S., Yao X., Fu Q. Ablation behavior and thermal protection performance of TaSi2 coating for SiC coated carbon/carbon composites. Ceramics Internatio­ nal. 2019;45(3):3256–3262. https://doi.org/10.1016/j.ceramint.2018.10.230Liu F., Li H., Gu S., Yao X., Fu Q. Ablation behavior and thermal protection performance of TaSi2 coating for SiC coated carbon/carbon composites. Ceramics Internatio­ nal. 2019;45(3):3256–3262. https://doi.org/10.1016/j.ceramint.2018.10.230Shi X., Zeng X., Li H., Fu Q., Zou J. TaSi2 oxidation protective coating for SiC coated carbon/carbon composites. Rare Metal Materials and Engineering. 2011;40(3):403–406. https://doi.org/10.1016/S1875-5372(11)60024-6Shi X., Zeng X., Li H., Fu Q., Zou J. TaSi2 oxidation protective coating for SiC coated carbon/carbon composites. Rare Metal Materials and Engineering. 2011;40(3):403–406. https://doi.org/10.1016/S1875-5372(11)60024-6Monclús M.A., Yang L., López-Cabañas I., Castillo-Rodríguez M., Zaman A., Wang J., Meletis E.I., González-Arrabal R., Llorca J., Molina-Aldareguía J.M. High temperature mechanical properties and microstructure of hard TaSiN coatings. Materials Science and Engineering: A. 2020;797: 139976. https://doi.org/10.1016/j.msea.2020.139976Monclús M.A., Yang L., López-Cabañas I., Castillo-Rodríguez M., Zaman A., Wang J., Meletis E.I., González-Arrabal R., Llorca J., Molina-Aldareguía J.M. High temperature mechanical properties and microstructure of hard TaSiN coatings. Materials Science and Engineering: A. 2020;797: 139976. https://doi.org/10.1016/j.msea.2020.139976Mešić B., Schroeder H. Properties of TaSiN thin films deposited by reactive radio frequency magnetron sputtering. Thin Solid Films. 2012;520(13):4497–4500. https://doi.org/10.1016/j.tsf.2012.02.068Mešić B., Schroeder H. Properties of TaSiN thin films deposited by reactive radio frequency magnetron sputtering. Thin Solid Films. 2012;520(13):4497–4500. https://doi.org/10.1016/j.tsf.2012.02.068Сытченко А.Д., Левашов Е.А., Кирюханцев-Корнеев Ф.В. Структура и свойства покрытий Ta–Si–N, полученных методом импульсного магнетронного распыления. Известия вузов. Порошковая металлургия и функциональные покрытия. 2021;15(2):60–67. https://doi.org/10.17073/1997-308X-2021-2-60-67Sytchenko A.D., Levashov E.A., Kiryukhantsev-Korneev P.V. Structure and properties of Ta–Si–N coatings obtained by pulsed magnetron sputtering. Russian Journal of Non­Ferrous Metals. 2021;62(5):611–617. https://doi.org/10.3103/S1067821221050151Bondarev A.V., Vorotilo S.A., Shchetinin I.V., Levashov E.A., Shtansky D.V. Fabrication of Ta–Si–C targets and their utilization for deposition of low friction wear resistant nanocomposite Si–Ta–C–(N) coatings intended for wide temperature range tribological applications. Surface and Coatings Technology. 2019;359:342–353. https://doi.org/10.1016/j.surfcoat.2018.12.030Bondarev A.V., Vorotilo S.A., Shchetinin I.V., Levashov E.A., Shtansky D.V. Fabrication of Ta–Si–C targets and their utilization for deposition of low friction wear resistant nanocomposite Si–Ta–C–(N) coatings intended for wide temperature range tribological applications. Surface and Coatings Technology. 2019;359:342–353. https://doi.org/10.1016/j.surfcoat.2018.12.030Ren Y., Qian Y., Xu J., Jiang Y., Zuo J., Li M. Oxidation and cracking/spallation resistance of ZrB –SiC–TaSi –Si coating on siliconized graphite at 1500 °C in air. Ceramics International. 2020;46(5):6254–6261. https://doi.org/10.1016/j.ceramint.2019.11.095Ren Y., Qian Y., Xu J., Jiang Y., Zuo J., Li M. Oxidation and cracking/spallation resistance of ZrB –SiC–TaSi –Si coating on siliconized graphite at 1500 °C in air. Ceramics International. 2020;46(5):6254–6261. https://doi.org/10.1016/j.ceramint.2019.11.095Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Vorotilo S.A., Klechkovskaya V.V., Lopatin V.Y., Levashov E.A. Structure, oxidation resistance, mechanical, and tribological properties of Nand C-doped Ta–Zr–Si–B hard protective coatings obtained by reactive D.C. magnetron sputtering of TaZrSiB ceramic cathode. Coatings. 2020;10(10):946. https://doi.org/10.3390/coatings10100946Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Vorotilo S.A., Klechkovskaya V.V., Lopatin V.Y., Levashov E.A. Structure, oxidation resistance, mechanical, and tribological properties of Nand C-doped Ta–Zr–Si–B hard protective coatings obtained by reactive D.C. magnetron sputtering of TaZrSiB ceramic cathode. Coatings. 2020;10(10):946. https://doi.org/10.3390/coatings10100946Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Sviridova T.A., Sidorenko D.A., Andreev N.V., Klechkovskaya V.V., Polčak J., Levashov E.A. Effects of doping with Zr and Hf on the structure and properties of Mo–Si–B coatings obtained by magnetron sputtering of composite targets. Surface and Coatings Technology. 2022;442:128141. https://doi.org/10.1016/j.surfcoat.2022.128141Kiryukhantsev-Korneev Ph.V., Sytchenko A.D., Sviridova T.A., Sidorenko D.A., Andreev N.V., Klechkovskaya V.V., Polčak J., Levashov E.A. Effects of doping with Zr and Hf on the structure and properties of Mo–Si–B coatings obtained by magnetron sputtering of composite targets. Surface and Coatings Technology. 2022;442:128141. https://doi.org/10.1016/j.surfcoat.2022.128141Кирюханцев-Корнеев Ф.В. Возможности метода оптической эмиссионной спектроскопии тлеющего разряда GDOES при исследовании покрытий. Известия вузов. Порошковая металлургия и функциональные покрытия. 2013;(2):60–70. https://doi.org/10.17073/1997-308X-2013-2-60-70Kiryukhantsev-Korneev F.V. Possibilities of glow discharge optical emission spectroscopy in the investigation of coatings. Russian Journal of Non­Ferrous Metals. 2014;55(5): 494–504. http://doi.org/10.3103/S1067821214050137Kiryukhantsev-Korneev P.V., Phiri J., Gladkov V.I., Ratnikov S.N., Yakovlev M.G., Levashov E.A. Erosion and abrasion resistance, mechanical properties, and structure of the TiN, Ti–Cr–Al–N and Cr–Al–Ti–N coatings deposited by CFUBMS. Protection of Metals and Physical Chemistry of Surfaces. 2019;55(5):913–923. https://doi.org/10.1134/S2070205119050125Kiryukhantsev-Korneev P.V., Phiri J., Gladkov V.I., Ratnikov S.N., Yakovlev M.G., Levashov E.A. Erosion and abrasion resistance, mechanical properties, and structure of the TiN, Ti–Cr–Al–N and Cr–Al–Ti–N coatings deposited by CFUBMS. Protection of Metals and Physical Chemistry of Surfaces. 2019;55(5):913–923. https://doi.org/10.1134/S2070205119050125Mirzaei S., Alishahi M., Souček P., Ženíšek J., Holec D., Koutná N., Buršíková V., Stupavská M., Zábranský L., Burmeister F., Blug B., Czigány Zs., Balázsi K., Mikšová R., Vašina P. The effect of chemical composition on the structure, chemistry and mechanical properties of magnetron sputtered W–B–C coatings: Modeling and Experiments. Surface and Coatings Technology. 2020;383: 125274. https://doi.org/10.1016/j.surfcoat.2019.125274Mirzaei S., Alishahi M., Souček P., Ženíšek J., Holec D., Koutná N., Buršíková V., Stupavská M., Zábranský L., Burmeister F., Blug B., Czigány Zs., Balázsi K., Mikšová R., Vašina P. The effect of chemical composition on the structure, chemistry and mechanical properties of magnetron sputtered W–B–C coatings: Modeling and Experiments. Surface and Coatings Technology. 2020;383: 125274. https://doi.org/10.1016/j.surfcoat.2019.125274Musil J. Hard nanocomposite coatings: Thermal stability, oxidation resistance and toughness. Surface and Coatings Technology. 2012;207:50–65. https://doi.org/10.1016/j.surfcoat.2012.05.073Musil J. Hard nanocomposite coatings: Thermal stability, oxidation resistance and toughness. Surface and Coatings Technology. 2012;207:50–65. https://doi.org/10.1016/j.surfcoat.2012.05.073Hu J., Li H., Li J., Huang J., Kong J., Zhu H., Xiong D. Structure, mechanical and tribological properties of TaCx composite films with different graphite powers. Journal of Alloys and Compounds. 2020;832:153769. https://doi.org/10.1016/j.jallcom.2020.153769Hu J., Li H., Li J., Huang J., Kong J., Zhu H., Xiong D. Structure, mechanical and tribological properties of TaCx composite films with different graphite powers. Journal of Alloys and Compounds. 2020;832:153769. https://doi.org/10.1016/j.jallcom.2020.153769Nah J.W., Hwang S.K., Lee C.M. Development of a complex heat resistant hard coating based on (Ta, Si)N by reactive sputtering. Materials Chemistry and Physics. 2000;62(2):115–121. https://doi.org/10.1016/S0254-0584(99)00142-XNah J.W., Hwang S.K., Lee C.M. Development of a complex heat resistant hard coating based on (Ta, Si)N by reactive sputtering. Materials Chemistry and Physics. 2000;62(2):115–121. https://doi.org/10.1016/S0254-0584(99)00142-XMartínez-Martínez D., López-Cartes C., Justo A., Fernández A., Sánchez-López J.C. Self-lubricating Ti–C–N nanocomposite coatings prepared by double magnetron sputtering. Solid State Sciences. 2009;11(3):660–670. https://doi.org/10.1016/j.solidstatesciences.2008.10.017Martínez-Martínez D., López-Cartes C., Justo A., Fernández A., Sánchez-López J.C. Self-lubricating Ti–C–N nanocomposite coatings prepared by double magnetron sputtering. Solid State Sciences. 2009;11(3):660–670. https://doi.org/10.1016/j.solidstatesciences.2008.10.017Kiryukhantsev-Korneev P.V., Pierson J.F., Bychkova M.Y., Manakova O.S., Levashov E.A., Shtansky D.V. Comparative study of sliding, scratching, and impact-loading behavior of hard CrB2 and Cr–B–N films. Tribology Letters. 2016;63(3):44. https://doi.org/10.1007/s11249-016-0729-0Kiryukhantsev-Korneev P.V., Pierson J.F., Bychkova M.Y., Manakova O.S., Levashov E.A., Shtansky D.V. Comparative study of sliding, scratching, and impact-loading behavior of hard CrB2 and Cr–B–N films. Tribology Letters. 2016;63(3):44. https://doi.org/10.1007/s11249-016-0729-0Bondarev A.V., Antonyuk M.N., Kiryukhantsev-Korneev Ph.V., Polcar T., Shtansky D.V. Insight into high temperature performance of magnetron sputtered Si–Ta–C–(N) coatings with an ion-implanted interlayer. Applied Surface Science. 2021;541:148526. https://doi.org/10.1016/j.apsusc.2020.148526Bondarev A.V., Antonyuk M.N., Kiryukhantsev-Korneev Ph.V., Polcar T., Shtansky D.V. Insight into high temperature performance of magnetron sputtered Si–Ta–C–(N) coatings with an ion-implanted interlayer. Applied Surface Science. 2021;541:148526. https://doi.org/10.1016/j.apsusc.2020.148526XPS Database. http://www.lasurface.com/database/elementxps.phpXPS Database. http://www.lasurface.com/database/elementxps.phpVargas M., Castillo H.A., Restrepo-Parra E., De La Cruz W. Stoichiometry behavior of TaN, TaCN and TaC thin films produced by magnetron sputtering. Applied Surface Science. 2013;279:7–12. https://doi.org/10.1016/j.apsusc.2013.03.028Vargas M., Castillo H.A., Restrepo-Parra E., De La Cruz W. Stoichiometry behavior of TaN, TaCN and TaC thin films produced by magnetron sputtering. Applied Surface Science. 2013;279:7–12. https://doi.org/10.1016/j.apsusc.2013.03.028Sánchez-López J.C., Martínez-Martínez D., LópezCartes C., Fernández A. Tribological behaviour of titanium carbide/amorphous carbon nanocomposite coatings: From macro to the micro-scale. Surface and Coatings Technology. 2008;202(16):4011–4018. https://doi.org/10.1016/j.surfcoat.2008.02.012Sánchez-López J.C., Martínez-Martínez D., LópezCartes C., Fernández A. Tribological behaviour of titanium carbide/amorphous carbon nanocomposite coatings: From macro to the micro-scale. Surface and Coatings Technology. 2008;202(16):4011–4018. https://doi.org/10.1016/j.surfcoat.2008.02.012González-Hernández A., Morales-Cepeda A.B., Caicedo J.C., Amaya C., Olive-Méndez S.F. Structure, functional groups analysis and tribo-mechanical behavior of carbide and nitride coatings deposited on AISI 1060 substrates by RF-magnetron sputtering. Journal of Materials Research and Technology. 2022;18:5432–5443. https://doi.org/10.1016/j.jmrt.2022.04.075González-Hernández A., Morales-Cepeda A.B., Caicedo J.C., Amaya C., Olive-Méndez S.F. Structure, functional groups analysis and tribo-mechanical behavior of carbide and nitride coatings deposited on AISI 1060 substrates by RF-magnetron sputtering. Journal of Materials Research and Technology. 2022;18:5432–5443. https://doi.org/10.1016/j.jmrt.2022.04.075

The authors declare that there are no conflicts of interest present.