References

powder

Известия вузов. Порошковая металлургия и функциональные покрытия

Powder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya)

1997-308X2412-8767

НИТУ "МИСИС"

10.17073/1997-308X-2024-4-55-68

powder-909

Research Article

Наноструктурированные материалы и функциональные покрытия

Nanostructured Materials and Functional Coatings

Жаростойкие покрытия Zr–Mo–Si–B, полученные методом магнетронного распыления в режимах DCMS и HIPIMS

Oxidation-resistant Zr–Mo–Si–B coatings deposited by DCMS and HIPIMS methods

https://orcid.org/0000-0002-8668-5877

Чертова

А. Д.

Chertova

A. D.

Алина Дмитриевна Чертова – к.т.н, мл. науч. сотрудник лаборатории «In situ диагностика структурных превращений» Научно-учебного центра (НУЦ) СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4

Alina D. Chertova – Cand. Sci. (Eng.), Junior Researcher, Laboratory “In situ Diagnostics of Structural Transformations” , Scientific-Educational Center of Self-Propagating High-temperature Synthesis of MISIS–ISMAN (SHS-Center)

4 Leninsky Prosp., Moscow 119049, Russia

alina-sytchenko@yandex.ru

https://orcid.org/0009-0001-2791-5732

Чударин

Ф. И.

Chudarin

F. I.

Фёдор Ильич Чударин – лаборант учебной лаборатории НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4

Fedor I. Chudarin – Laboratory Assistant, SHS-Center of MISIS–ISMAN

4 Leninsky Prosp., Moscow 119049, Russia

theodor2000@yandex.ru

https://orcid.org/0000-0002-0572-5030

Вахрушева

И. О.

Vakhrusheva

I. O.

Ирина Олеговна Вахрушева – инженер научного проекта НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4

Irina O. Vakhrusheva – Project Engineer, SHS-Center of MISIS–ISMAN

4 Leninsky Prosp., Moscow 119049, Russia

89896231497i@gmail.com

https://orcid.org/0000-0002-2153-0743

Капланский

Ю. Ю.

Kaplansky

Yu. Yu.

Юрий Юрьевич Капланский – к.т.н, науч. сотрудник лаборатории «In situ диагностика структурных превращений» НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4

Yuri Yu. Kaplansky – Cand. Sci. (Eng.), Researcher, Laboratory “In situ diagnostics of structural transformations” , SHS-Center of MISIS–ISMAN

4 Leninsky Prosp., Moscow 119049, Russia

ykaplanscky@mail.ru

https://orcid.org/0000-0002-9390-2825

Ren

Xuanru Ren – Dr. Sci., Professor

Zhengzhou 450046, China

Xuanru Ren – Dr. Sci., Professor

Zhengzhou 450046, China

renxuanru1986@163.com

https://orcid.org/0000-0002-9853-6457

Feng

Peizhong Feng – Dr. Sci., Professor

Xuzhou 221116, China

Peizhong Feng – Dr. Sci., Professor

Xuzhou 221116, China

pzfeng@cumt.edu.cn

https://orcid.org/0000-0002-0623-0013

Левашов

Е. А.

Levashov

E. A.

Евгений Александрович Левашов – д.т.н., проф., акад. РАЕН, зав. кафедрой порошковой металлургии и функциональных покрытий НИТУ МИСИС; директор НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4

Evgeniy A. Levashov – Dr. Sci. (Eng.), Professor, Academician of the Russian Academy of Natural Sciences, Head of the Department of Powder Metallurgy and Functional Coatings, NUST MISIS; Head of SHS-Center of MISIS–ISMAN

4 Leninsky Prosp., Moscow 119049, Russia

levashov@shs.misis.ru

https://orcid.org/0000-0003-1635-4746

Кирюханцев-Корнеев

Ф. В.

Kiryukhantsev-Korneev

Ph. V.

Филипп Владимирович Кирюханцев-Корнеев – д.т.н., проф. кафедры порошковой металлургии и функциональных покрытий, зав. лабораторией «In situ диагностика структурных превращений» НУЦ СВС МИСИС–ИСМАН

Россия, 119049, г. Москва, Ленинский пр-т, 4

Philipp V. Kiryukhantsev-Korneev – Dr. Sci. (Eng.), Professor of the Department of Powder Metallurgy and Functional Coatings, Head of the Laboratory «In situ Diagnostics of Structural Transformations”, SHS-Center of MISIS–ISMAN

4 Leninsky Prosp., Moscow 119049, Russia

kiruhancev-korneev@yandex.ru

Национальный исследовательский технологический университет «МИСИС»РоссияNational University of Science and Technology “MISIS”Russian Federation

Henan Academy of SciencesКитайHenan Academy of SciencesChina

China University of Mining and TechnologyКитайChina University of Mining and TechnologyChina

2024

28082024

1845568

2024

НИТУ "МИСИС"

https://powder.misis.ru/jour/about/submissions#copyrightNotice

https://powder.misis.ru/jour/article/view/909

Работа посвящена созданию жаростойких покрытий системы Zr–Mo–Si–B. Рассматриваются вопросы, связанные с процессом осаждения покрытий методами магнетронного распыления на постоянном токе (DCMS, direct current magnetron sputtering) и в высокомощном импульсном режиме (HIPIMS, high-power impulse magnetron sputtering). Выполнен анализ плазмы газового разряда, исследована структура, определены механические характеристики и жаростойкость полученных покрытий. Установлено, что они являются рентгеноаморфными и характеризуются плотной малодефектной структурой с равномерным распределением элементов по толщине. Все покрытия обладают высокой стойкостью к окислению при температурах 1100 и 1300 °С. Переход от режима DCMS к HIPIMS привел к снижению глубины окисления на 16–21 % при температуре 1300 °С. Покрытие, полученное в режиме DCMS, имело максимальную толщину и показало лучшую стойкость к окислению при температуре 1500 °С. Высокая жаростойкость покрытий обусловлена образованием защитной поверхностной оксидной пленки Si:B:O с диспергированными в ней нанокристаллитами фаз t-ZrSiO4 и m-ZrO2 .

This study focuses on the development of high-temperature oxidation-resistant coatings within the Zr–Mo–Si–B system. It addresses the deposition processes using direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS). The research includes an analysis of gas discharge plasma, investigation of the coating structure, and determination of the mechanical properties and high-temperature oxidation resistance of the resulting coatings. The coatings were found to be X-ray amorphous, characterized by a dense, defect-free structure with a uniform distribution of elements throughout their thickness. All coatings demonstrated high oxidation resistance at temperatures of 1100 and 1300 °C. The transition from DCMS to HIPIMS mode resulted in a 16–21 % reduction in oxidation depth at 1300 °C. The coating obtained via DCMS exhibited the greatest thickness and the best oxidation resistance at 1500 °C. The high-temperature oxidation resistance of the coatings is attributed to the formation of a protective surface oxide film of Si:B:O, with dispersed nanocrystallites t-ZrSiO4 and m-ZrO2 phases.

магнетронное распыление на постоянном токевысокомощное импульсное магнетронное распылениепокрытияжаростойкость

direct current magnetron sputteringhigh-power impulse magnetron sputteringcoatingshigh-temperature oxidation resistance

Работа выполнена при финансовой поддержке Российского научного фонда (проект № 23-49-00141). P. Feng и X. Ren выражают благодарность Национальному фонду естественных наук Китая за финансовую поддержку (проект № 52261135546).

This work was supported by the Russian Science Foundation (project No. 23-49-00141). P. Feng and X. Ren express their gratitude to the National Natural Science Foundation of China for financial support (project no. 52261135546).

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Kiryukhantsev-Korneev P.V., Sytchenko A.D., Kozlova N.S., Zabelina E.V., Sidorenko D.A., Levashov E.A., Feng P. Effect of nitrogen on the structure and properties of Zr–Si–B–N coatings deposited by magnetron sputtering. Surface and Coatings Technology. 2023;474:130042. https://doi.org/10.1016/j.surfcoat.2023.130042

The authors declare that there are no conflicts of interest present.