Структура, механические свойства и жаростойкость покрытий MoSi2, MoSiB и MoSiB/SiBC

Методом магнетронного напыления получены однослойные покрытия MoSi₂, MoSiB и многослойные MoSiB/SiBC. Структура покрытий исследована с применением рентгенофазового анализа, растровой электронной микроскопии и оптической эмиссионной спектроскопии тлеющего разряда. Механические свойства покрытий определены с помощью метода наноиндентирования. Исследованы термическая стабильность покрытий в диапазоне температур 600–1200 °С и жаростойкость при нагреве до 1500 °С. Установлено, что однослойные покрытия MoSiB обладают твердостью 27 ГПа, модулем упругости 390 ГПа и упругим восстановлением 48 %, а также могут кратковременно сопротивляться окислению до температуры 1500 °С включительно, что обусловлено формированием на их поверхности защитной пленки на основе SiO₂. Покрытия MoSi2 имеют твердость, сравнимую с твердостью покрытий MoSiB, но несколько уступают им по жаростойкости. Многослойные покрытия MoSiB/SiBC характеризовались твердостью 23–27 ГПа и жаростойкостью, ограниченной 1500 °С, но при этом обладали более высокими упругопластическими характеристиками по сравнению с MoSiB.

1. Hague J.R., Lynch J.F., Rudnick A. Refractory ceramics for aerospace. A material selection handbook. Amer. Ceram. Soc. 1964.

2. Lemberg J.A., Ritchie R.O. Mo—Si—B Alloys for ultrahigh-temperature structural applications. Adv. Mater. 2012. Vol. 24. P. 3445—3480.

3. Шульц М.М., Аппен А.А., Борисенко А.И., Горбунов Н.С., Харитонов Н.П., Веселов П.А. Жаростойкие покрытия для защиты конструкционных материалов. Л.: Наука, 1977.

4. Pang J., Blackwood D.J. Corrosion of titanium alloys in high temperature near anaerobic seawater. Corr. Sci. 2016. Vol. 105. P. 1—7.

5. Totemeier T.C., Wright R.N., Swank W.D. FeAl and Mo— Si—B intermetallic coatings prepared by thermal spraying. Intermetallics. 2004. Vol. 12. P. 1335—1344.

6. Wang Y., Wanga D., Yand J. Preparation and characterization of MoSi2/MoB composite coating on Mo substrate. J. Alloys Compd. 2014. Vol. 589. P. 384—388.

7. Zhang Y., Li H., Ren J., Li K. Microstructure and oxidation resistance of Si—Mo—B coating for C/SiC coated carbon/carbon composites. Corr. Sci. 2013. Vol. 72. P. 150—155.

8. Kuznetsov S.A., Rebrov E.V., Mies M.J.M., de Croon M.H.J.M., Schouten J.C. Synthesis of protective Mo—Si—B coatings in molten salts and their oxidation behavior in an air—water mixture. Surf. Coat. Technol. 2006. Vol. 201. P. 971—978.

9. Kudryashov A.E., Lebedev D.N., Potanin A.Yu., Levashov E.A. Structure and properties of coatings produced by pulsed electrospark deposition on nickel alloy using Mo—Si—B electrodes. Surf. Coat. Technol. 2018. Vol. 335. P. 104—117.

10. Perepezko J.H., Sossaman T.A., Taylor M. Environmentally resistant Mo—Si—B-based coatings. J. Them. Spray Tech. 2017. Vol. 26. P. 929—940.

11. Ritt P., Sakidja R., Perepezko J.H. Mo—Si—B based coating for oxidation protection of SiC—C composites. Surf. Coat. Technol. 2012. Vol. 206. P. 4166—4172.

12. Ming’e W., Guojia M., Xing L., Chuang D. Morphology and mechanical properties of TiN coatings prepared with different PVD methods. Rare Met. Mater. Eng. 2016. Vol. 45. P. 3080—3084.

13. Chu C.W., Jang J.S.C., Chen H.W., Chuang T.L. Enhanced wear resistance of the Cr-based thin film coating on micro drill by doping with W—C—N. Thin Solid Films. 2009. Vol. 517. P. 5197—5201.

14. Lawal J., Kiryukhantsev-Korneev P., Matthews A., Leyland A. Mechanical properties and abrasive wear behaviour of Al-based PVD amorphous/nanostructured coatings. Surf. Coat. Technol. 2017. Vol. 310. P. 59—69.

15. Kiryukhantsev-Korneev F.V., Sheveiko A.N., Komarov V.A., Blanter M.S., Skryleva E.A., Shirmanov N.A., Levashov E.A., Shtansky D.V. Nanostructured Ti—Cr—B—N and Ti— Cr—Si—C—N coatings for hard-alloy cutting tools. Russ. J. Non-Ferr. Met. 2011. Vol. 52. P. 311—318.

16. Wu J., Wu B.H., Ma D.L., Xie D., Wu Y.P., Chen C.Z., Li Y.T., Sun H., Huang N., Lenga Y.X. Effects of magnetic field strength and deposition pressure on the properties of TiN films produced by high power pulsed magnetron sputtering (HPPMS). Surf. Coat. Technol. 2017. Vol. 315. P. 258—267.

17. Kiryukhantsev-Korneev Ph.V., Pierson J.F., Kuptsov K.A., Shtansky D.V. Hard Cr—Al—Si—B—(N) coatings deposited by reactive and non-reactive magnetron sputtering of CrAlSiB target. Appl. Surf. Sci. 2014. Vol. 314. P. 104—111.

18. Kiryukhantsev-Korneev Ph.V., Pierson J.F., Bychkova M.Y., Manakova O.S., Levashov E.A., Shtansky D.V. Comparative study of sliding, scratching and impact-loading behavior of hard CrB2 and Cr—B—N films. Tribol. Lett. 2016. Vol. 63. P. 1—11.

19. Audronis M., Leyland A., Matthews A., Kiryukhantsev-Korneev F.V., Shtansky D.V., Levashov E.A. The structure and mechanical properties of Ti—Si—B coatings deposited by DC and pulsed-DC unbalanced magnetron sputtering. Plasma Process. Polym. 2007. Vol. 4. P. 687—692.

20. Vančo M., Krmela J., Pešlová F. The use of PVD coating on natural textile fibers. Proc. Eng. 2016. Vol. 136. P. 341—345.

21. Shtansky D.V., Grigoryan A.S., Toporkova A.K., Arkhipov A.V., Sheveyko A.N., Kiryukhantsev-Korneev Ph.V. Modification of polytetrafluoroethylene implants by depositing TiCaPCON films with and without stem cells. Surf. Coat. Technol. 2011. Vol. 206. P. 1188—1195.

22. Wenbin F., Mingjiang D., Chunbei W., Mingchun Z., Liang H., Huijun H., Songsheng L. Magnetron sputtering preparation and properties of SiC/MoSi2 oxidation protective coating for carbon/carbon composites prepared. Rare Met. Mater. Eng. 2016. Vol. 45. P. 2543—2548.

23. Yanping Xia, Peihong Wang, Shiwei Shi, Miao Zhang, Gang He, Jianguo Lv, Zhaoqi Sun. Deposition and characterization of AZO thin films on flexible glass substrates using DC magnetron sputtering technique. Ceram. Inter. 2017. Vol. 43. Iss. 5. P. 4536—4544.

24. Tsai D., Deng M., Chang Z., Kuo B., Chen E., Chang S., Shieu F. Oxidation resistance and characterization of (AlCrMoTaTi)—Six—N coating deposited via magnetron sputtering. J. Alloys Compd. 2015. Vol. 647. P. 179—188.

25. Lin C.H., Duh J.G., Yeh J.W. Multi-component nitride coatings derived from Ti—Al—Cr—Si—V target in RF magnetron sputter. Surf. Coat. Technol. 2007. Vol. 201. P. 6304—6308.

26. Kiryukhantsev-Korneev Ph.V., Bondarev A.V., Shtansky D.V., Levashov E.A. Structure and properties of nanocomposite Mo—Si—B—(N) coatings. Protec. Met. Phys. Chem. Surf. 2015. Vol. 51. P. 794—802.

27. Kiryukhantsev-Korneev Ph.V., Andreev S.O., Shvyndina N.V., Levashov E.A., Timofeev A.N., Shtansky D.V. The influence of Si concentrations on the oxidation resistance of Mo— Si—B—(N) coatings. Russ. J. Non-Ferr. Met. 2014. Vol. 55. P. 645—651.

28. Kiryukhantsev-Korneev Ph.V., Iatsyuk I.V., Shvindina N.V., Levashov E.A., Shtansky D.V. Comparative investigation of structure, mechanical properties, and oxidation resistance of Mo—Si—B and Mo—Al—Si—B coatings. Corr. Sci. 2017. Vol. 123. P. 319—327.

29. Yao X.-Y., Li H.-J., Zhang Y.-L., Ren J.-J., Yao D.-J., Tao J. A SiC/ZrB2—SiC/SiC oxidation resistance multilayer coating for carbon/carbon composites. Corr. Sci. 2012. Vol. 57. P. 148—153.

30. Bae K.-E., Chae K.-W., Park J.-K., Lee W.-S., Baika Y.-J. Oxidation behavior of amorphous boron carbide—silicon carbide nano-multilayer thin films. Surf. Coat. Technol. 2015. Vol. 276. P. 55—58.

31. Fukumoto N., Ezura H.,Yamamoto K., Hotta A., Suzuki T. Effects of bilayer thickness and post-deposition annealing on the mechanical and structural properties of (Ti,Cr,Al) N/(Al,Si)N multilayer coatings. Surf. Coat. Technol. 2009. Vol. 203. P. 1343—1348.

32. Kiryukhantsev-Korneev Ph.V., Sheveyko A.N., Levashov E.A., Shtansky D.V. Investigation of the Si—B—C—N coatings deposited by magnetron sputtering of SiBC targets. Russ. J. Non-Ferr. Met. 2015. Vol. 56. P. 540—547.

33. Levashov E.A., Pogozhev Yu.S., Potanin A.Yu., Kochetov N.A., Kovalev D.Yu., Shvyndina N.V., Sviridova T.A. Self-propagating high-temperature synthesis of advanced ceramics in the Mo—Si—B system: Kinetics and mechanism of combustion and structure formation. Ceram. Int. 2014. Vol. 40. P. 6541—6552.

34. Kiryukhantsev-Korneev Ph.V., Sheveyko A.N., Lemesheva M., Rupasov S.I., Levashov E.A. Investigation of Si—B— C—N coatings produced by ion sputtering of SiBC target. Protect. Met. Phys. Chem. Surf. 2012. Vol. 48. P. 585—590.

35. Golovin Yu.I. Nanoindentation and mechanical properties of solids in submicrovolumes, thin near-surface layers, and films: A review. Phys. Solid State. 2008. Vol. 50. P. 2205—2236.

36. Yuki Itoh, Kennichi Wakisaka, Masashi Satoh, Shinzo Yoshikado. Fabrication and application of MoSi2 thin-film electric heaters. Key Eng. Mater. 2006. Vol. 320. P. 95—98.

37. Musil J., Zeman P., Baroch P. Hard nanocomposite coatings. Comprehensive Mater. Process. 2014. Vol. 4. P. 325—353.

38. Chakraborty S.P. Development of protective coating of MoSi2 over TZM alloy substrate by slurry coating technique. Mater. Today: Proc. 2016. Vol. 3. P. 3071—3076.

39. Cai Z., S. Liu S., Xiao L., Fang Z., Lia W., Zhang B. Oxidation behavior and microstructural evolution of a slurry sintered Si—Mo coating on Mo alloy at 1650 °C. Surf. Coat. Technol. 2017. Vol. 324. P. 182—189.

40. Wang Y., Wang D., Yan J., Sun A. Preparation and characterization of molybdenum disilicide coating on molybdenum substrate by air plasma spraying. Appl. Surf. Sci. 2013. Vol. 284. P. 881—888.

41. Shtansky D.V., Lyasotsky I.V., D’yakonova N.B., Kiryukhantsev-Korneev F.V., Kulinich S.A., Levashov E.A., Moore J.J. Comparative investigation of Ti—Si—N films magnetron sputtered using Ti5Si3 + Ti and Ti5Si3 + TiN targets. Surf. Coat. Technol. 2004. Vol. 182. P. 204—214.

42. Saladukhin I.A., Abadias G., Uglov V.V., Zlotski S.V., Michel A., Janse van Vuurend A. Thermal stability and oxidation resistance of ZrSiN nanocomposite and ZrN/SiNx multilayered coatings: A comparative study. Surf. Coat. Technol. 2017. Vol. 332. P. 428—439.

43. Ohishi Y., Kurosaki K., Suzuki T., Muta H. Yamanaka S., Uchida N., Tada T., Kanayama T. Synthesis of silicon and molybdenum—silicide nanocrystal composite films having low thermal conductivity. Thin Solid Films. 2013. Vol. 534. P. 238—241.

44. Chou T.C., Nieh T.G. Phase transformation and mechanical properties of thin MoSi2 films produced by sputter deposition. Thin Solid Films. 1992. Vol. 214. P. 48—57.

45. Hidouci A., Pelletier J.M. Microstructure and mechanical properties of MoSi2 coatings produced by laser processing. Mater. Sci. Eng. A. 1998. Vol. 252. P. 17—26.

46. Fei X., Y.Niu, Ji H., Huang L., Zheng X. A comparative study of MoSi2 coatings manufactured by atmospheric and vacuum plasma spray processes. Ceram. Int. 2011. Vol. 37. P. 813—817.

47. Kiryukhantsev-Korneev F.V., Novikov A.V., Sagalova T.B., Petrzhik M.I., Levashov E.A., Shtanskyv D.V. A comparative study of microstructure, oxidation resistance, mechanical, and tribological properties of coatings in Mo—B—(N), Cr—B—(N) and Ti—B—(N) systems. Phys. Met. Metallogr. 2017. Vol. 118. P. 1136—1146.

48. Kung H., Jervis T. R., Hirvonen J.P., Mitchell T. E., Nastasi M. High-temperature structural stability of MoSi2based nanolayer composites. J. Vac. Sci. Technol. 1995. Vol. 13(3). P. 1126—1129.

49. Kondratenko V.V., Pershin Yu.P., Poltseva O.V., Fedorenko A.I., Zubarev E.N., Yulin S.A., Kozhevnikov I.V., Sagitov S.I., Chirkov V.A., Levashov V.E., Vinogradov A.V. Thermal stability of soft Х-ray Mo—Si and MoSi2—Si multilayer mirrors. Appl. Optics. 1993. Vol. 32. P. 1811—1816.