Investigation of the processes of the formation of a nonequilibrium phase-structural state in FeTiB films obtained by magnetron sputtering
https://doi.org/10.17073/1997-308X-2020-3-65-75
Abstract
The main trends of modern developing magnetic microelectronics are miniaturization and speed, while ensuring efficient operation in the MHz and GHz frequency ranges of magnetic fields. Developing new magnetic materials featured by properties that ensure the implementation of these trends is the key fundamental and applied problem of materials science. In this regard, Fe-Me-X nanocrystalline soft magnetic alloys (Me is one of the metals from Group IVb of the Periodic Table, X is one of the N, C, O, B light elements) obtained in the form of films are of interest. As shown earlier by the authors of this article on Fe-Zr-N films, such films featuring by the Fe/MeX two-phase structure can provide a combination of high saturation induction (Bs), low coercive force (Hc), high hardness, and thermal stability of the structure. The films were produced by magnetron sputtering. The data obtained and published by the authors on the Fe–Ti–B films earlier indicate great prospects for their application in modern microelectronics. There are no any other published results of FeTiB film studies in the context of microelectronics applications. In this paper, we continue the studies of FeTiB films started earlier to identify the chemical and phase composition providing the level of properties required for film application in microelectronics. Nanocrystalline films containing 0 to 14.3 at.% Ti and 0 to 28.9 at.% B were obtained by DC magnetron sputtering. The phase-structural state of the films was studied by X-ray diffraction and transmission electron microscopy. All films are divided into 3 groups according to phase composition: single-phase (supersaturated solid solution of Ti in α-Fe), two-phase (α-Fe(Ti)/α-Ti, α-Fe(Ti)/TiB2, α-Fe (Ti)/FeTi, α-Fe(Ti)/Fe2B) and XRD amorphous. It is shown that XRD amorphous films feature by a mixed structure represented by a solid solution of α-Fe(Ti) with a grain size between 0.7 and 2 nm and an amorphous phase. A reasonable assumption is made on the amorphous phase enrichment by boron. A quantitative assessment of the α-Fe(Ti) phase grain size and its dependence on the chemical and phase composition of the films is given. The mechanisms of solid solution and dispersion hardening determine the grain size of this phase.
Keywords
FeTiB soft magnetic nanocrystalline films,
magnetron sputtering,
phase composition,
structural characteristics
Supporting agencies: The research was funded by the Russian Foundation for Basic Research (Project No. 18-03-00502). Electron microscopic studies were conducted using the equipment from the common use center of the RAS Institute of Crystallography (Project RFMEFI62119X0035) as part of the government task of the RAS Federal research and Development Center «Crystallography and Photonics» with support from the Ministry of Science and Higher Education of the Russian Federation.
About the Authors
E. N. Sheftel
Baikov Institute of Metallurgy and Materials Science (IMMS) of RAS
Russian Federation
Russian Federation
Sheftel E.N. – Dr. Sci. (Eng.), Prof., Leading researcher of the Laboratory No. 7
119334, Russia, Moscow, Leninskii pr., 49
V. A. Tedzhetov
Baikov Institute of Metallurgy and Materials Science (IMMS) of RAS
Russian Federation
Russian Federation
Tedzhetov V.A. – Junior researcher of the Laboratory No. 7
119334, Russia, Moscow, Leninskii pr., 49
Ph. V. Kiryukhantsev-Korneev
National University of Science and Technology «MISIS»
Russian Federation
Russian Federation
Kiryukhantsev-Korneev Ph.V. – Cand. Sci. (Eng.), Leading research scientist of the Scientific-Educational Centre of SHS; Associate professor of the Department of powder metallurgy and functional coatings
119049, Russia, Moscow, Leninskii pr., 4
E. V. Harin
Baikov Institute of Metallurgy and Materials Science (IMMS) of RAS
Russian Federation
Russian Federation
Harin E.V. – Cand. Sci. (Eng.), Researcher of the Laboratory No. 7
119334, Russia, Moscow, Leninskii pr., 49
G. Sh. Usmanova
Baikov Institute of Metallurgy and Materials Science (IMMS) of RAS
Russian Federation
Russian Federation
Usmanova G.Sh. – Cand. Sci. (Eng.), Senior researcher of the Laboratory No. 7
119334, Russia, Moscow, Leninskii pr., 49
O. M. Zhigalina
Federal Research Center Crystallography and Photonics of RAS; Bauman Moscow State Technical University
Russian Federation
Russian Federation
Zhigalina O.M. – Dr. Sci. (Phys.-Math.), Leading research scientist of the Laboratory of electron microscopy; Professor of the Department «Material science»
119333, Russia, Moscow, Leninskii pr., 59
105005, Russia, Moscow, 2-nd Baumanskaya str., 5
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Review
For citations:
Sheftel E.N., Tedzhetov V.A., Kiryukhantsev-Korneev P.V., Harin E.V., Usmanova G.Sh., Zhigalina O.M. Investigation of the processes of the formation of a nonequilibrium phase-structural state in FeTiB films obtained by magnetron sputtering. Powder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya). 2020;(3):65-75. (In Russ.) https://doi.org/10.17073/1997-308X-2020-3-65-75
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