For citations:
Sytchenko A.D., Levashov E.A., Kiryukhantsev-Korneev P.V. Structure and properties of Ta–Si–N coatings obtained by pulsed magnetron sputtering. Powder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya). 2021;(2):60-67. (In Russ.) https://doi.org/10.17073/1997-308X-2021-2-60-67
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