THERMODYNAMIC ASSESSMENT OF CAPABILITY FOR DEPOSITION OF SILICON BORIDES FROM THEIR HALOGENIDES
https://doi.org/10.17073/1997-308X-2017-1-58-63
Abstract
The paper presents the results of predictive calculation of boron silicide thermodynamic properties (enthalpy, entropy, heat capacity) required for the thermodynamic analysis of the Si–B–Cl–H system conducted by means of the TERRA software. The paper considers cases of SiB4 and SiB6 condensed phase formation in the reaction mixture. The chemical vapor deposition parameters (temperature, pressure, the ratio of initial reagents) of silicon borides were evaluated by thermodynamic calculations of the Si–B–Cl–H system formed by the SiCl4, BCl3, and H2 for a temperature range of 1000–2200 K and a pressure range of 0,00001–0,1 MPa. The paper demonstrates that thermodynamic stability of higher chlorides in the Si–B–Cl system decreases with decrease in pressure, while the proportion of lower chlorides increases, i.e. degradation of initial silicon and boron chlorides occurs, but condensed phases SiB4 and SiB6 do not form – their appearance is facilitated by hydrogen introduction. It was determined that both single-phase and multiphase coatings can be produced by varying the chemical vapor deposition parameters. The results obtained in this paper are of scientific and practical interest for the developers of various silicon boride production processes (gas phase, liquid phase, etc.).
About the Authors
P. A. Timofeev
Bauman Moscow State Technology University n.a. N.E. Bauman,
JCS «Kompozit»
Russian Federation
Russian Federation
postgraduate student, Department «Rocket and space composite materials and structures»,
Bauman Moscow State Technology University n.a. N.E. Bauman, ingeneer of JCS «Kompozit»
A. N. Timofeev
JCS «Kompozit»
Russian Federation
Russian Federation
Dr. Sci. (Tech)., vice-director of JCS «Kompozit»
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Review
For citations:
Timofeev P.A., Timofeev A.N. THERMODYNAMIC ASSESSMENT OF CAPABILITY FOR DEPOSITION OF SILICON BORIDES FROM THEIR HALOGENIDES. Powder Metallurgy аnd Functional Coatings (Izvestiya Vuzov. Poroshkovaya Metallurgiya i Funktsional'nye Pokrytiya). 2017;(1):58-63. (In Russ.) https://doi.org/10.17073/1997-308X-2017-1-58-63
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